Mask Assembly Frame Height Difference for Deposition Accuracy

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Solution Overview

Problem

In the process of thin film vapor deposition for flat panel displays, residual cleansing solutions between unit masks and frames can lead to protrusions and depressions, reducing vapor deposition accuracy and causing errors due to compromised adhesive characteristics between masks and substrates.

Innovation Solution

A mask assembly design featuring a frame with specific supporting portions and unit masks, where the first supporting portion has a height difference to minimize the gap and prevent solution residue, ensuring precise deposition and reducing errors by maintaining the shape integrity of the masks.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If unit masks are fixed on a flat frame surface, then the structure is simple and easy to manufacture, but cleansing solution remains in gaps between masks and frame causing protrusions and depressions that reduce vapor deposition accuracy

Engineering Contradiction:

Improvevapor deposition accuracyVSAvoidframe structure complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The frame's supporting portion is designed with different heights at different locations: the first surface has a greater height than the second surface. This local height differentiation creates a slope that facilitates cleansing solution drainage while maintaining simple unit mask structures, thereby improving vapor deposition accuracy without significantly complicating the overall device.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The frame's first surface is positioned closer to the opening than the second surface, creating a three-dimensional height difference. This dimensional change in the frame structure enables the cleansing solution to drain toward the second surface, preventing residue accumulation between masks and frame, and thus eliminating protrusions and depressions that would compromise deposition precision.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If gaps between unit masks and frame are minimized, then cleansing solution residue is reduced, but the adhesive characteristics between masks and substrates may be compromised

Engineering Contradiction:

Improvevapor deposition accuracyVSAvoidadhesive characteristics

Core Design Contradiction:

Manufacturing precisionVSReliability

Solution Approach 1:

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The frame structure is pre-designed with a height difference between its first and second surfaces, creating a built-in drainage path that proactively prevents cleansing solution accumulation. This preliminary structural arrangement ensures that gaps between masks and frame are minimized without compromising adhesive characteristics, as the design anticipates and prevents the formation of protrusions and depressions before they can affect deposition quality.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design minimizes residual cleansing solutions, prevents protrusions and depressions, enhances vapor deposition accuracy, and maintains the adhesive characteristics between masks and substrates, thereby reducing errors and improving the overall deposition process.

Implementation Method 1

The unit masks are fixed on the first supporting portion while having a tensile force applied thereto

Methodology Applied

Scientific EffectTensile force: Tension

Implementation Method 2

The second surface has a height difference to the first surface along a thickness direction of the unit masks from the first surface

Methodology Applied

Scientific EffectGravity: Gravitation

Implementation Method 3

a mask assembly for thin film vapor deposition of a flat panel display

Methodology Applied

Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentUS8286579B2Mask assembly for thin film vapor deposition of flat panel display

Publication Date: 2012.10.16 SAMSUNG DISPLAY CO LTD

AI summary

A mask assembly for thin film vapor deposition of a flat panel display is disclosed. In the mask assembly, a cleansing solution remaining in the gap between a unit mask and a frame after cleansing the mask assembly may be minimized. The mask assembly includes a frame and a plurality of unit masks. The frame includes a pair of first supporting portions and a pair of second supporting portions that surround an opening. The plurality of unit masks have at least one set of pattern openings, and the unit masks are fixed on the first supporting portion while having a tensile force applied thereto. The first supporting portion includes a first surface and a second surface. The unit masks are fixed on the first surface, and the second surface has a height difference to the first surface along a thickness direction of the unit masks from the first surface.