Mask Assembly Magnetic Part for Deposition Adhesion
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Solution Overview
Problem
In the deposition process for organic thin film fabrication, the reduced thickness of masks leads to decreased magnetic force and adhesion between the mask and the substrate, resulting in non-uniform film growth and defects.
Innovation Solution
A mask assembly is designed with a magnetic part comprising ferromagnetic particles and a resin, applied to the surface of the mask, enhancing the magnetic force and adhesion between the mask and the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the mask thickness is decreased to fabricate high-resolution substrate, then the manufacturing precision is improved, but the magnetic force and adhesion between mask and substrate deteriorate
Solution Approach 1:
The patent applies composite materials by combining ferromagnetic particles with a resin to form a magnetic part. This composite structure provides both the necessary magnetic force for adhesion and the mechanical strength required, thereby resolving the contradiction between maintaining thin mask thickness for high resolution and ensuring sufficient magnetic force for proper adhesion to the substrate.
2Manufacturing precision
If the mask thickness is decreased to fabricate high-resolution substrate, then the manufacturing precision is improved, but the adhesion between mask and substrate deteriorates
Solution Approach 1:
The magnetic part composed of ferromagnetic particles and resin creates a composite structure that enhances adhesion strength through magnetic attraction while maintaining the thin profile of the mask. This allows high-resolution fabrication to be achieved without sacrificing the necessary adhesion between mask and substrate.
3Manufacturing precision
If the mask thickness is decreased, then the manufacturing precision is improved, but gaps form between mask and substrate resulting in defects
Solution Approach 1:
The magnetic part made from ferromagnetic particles and resin ensures reliable and uniform adhesion across the mask surface, preventing gaps from forming between the mask and substrate. This maintains deposition uniformity and eliminates defects while allowing the mask to remain thin for high-resolution fabrication.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The integration of the magnetic part on the mask surface improves the adhesion and uniformity of the organic thin film deposition, reducing defects and enhancing the accuracy of the fabrication process.
Implementation Method 1
The mask and the substrate are adhered closely by a magnetic force. As the thickness of the mask decreases, the mass of the mask also decreases. Hence, the magnetic force between the mask and the substrate may also decrease
Implementation Method 2
The magnetic particle may include a ferromagnetic material
Data Source
AI summary
A mask assembly includes: a mask frame; a mask supported by the mask frame, the mask including a plurality of pattern holes; and a magnetic part disposed on one surface of the mask. The magnetic part provides a magnetic force between the mask and a target substrate and improves an adhesion between the mask and the target substrate to prevent deposition defects.