Mask Assembly with Movable Members for Tensile Force Control
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Solution Overview
Problem
Existing mask assemblies for thin-film deposition processes face challenges in controlling tensile force during mask fixation, leading to etching errors, drooping, and reduced uniformity and accuracy of pattern openings, resulting in high mask discard rates and increased production costs.
Innovation Solution
A mask assembly with a frame and movable members that allow independent control of tensile force application in multiple directions, enabling precise fixation and adjustment of the mask to maintain pattern opening uniformity and accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the mask is extended and welded to the frame, then the mask can be fixed to the frame, but the tensile force cannot be controlled and the mask may droop or generate etching errors
Solution Approach 1:
The patent introduces movable members that allow the mask to be adjusted dynamically after fixation. The mask can be moved in at least one direction (preferably two directions) along the frame, enabling real-time adjustment of tensile force and position to maintain pattern opening uniformity and pixel position accuracy while ensuring stable fixation.
2Area of stationary object
If the mask is extended to be larger, then more coverage is achieved, but the etching error increases and the center of the mask droops by self-gravitation
Solution Approach 1:
The movable members enable dynamic adjustment of the mask position and tensile force distribution. By moving the mask along the frame in controlled directions, the system can compensate for gravitational droop and maintain uniform tensile force distribution across large mask areas, preventing center droop and reducing etching errors while achieving extensive coverage.
Solution Approach 2:
The patent allows changing the tensile force parameter and position parameters of the mask by moving the movable members. This enables adjustment of the mask state to counteract gravitational effects and maintain manufacturing precision even as the mask area increases.
3Stability of the object's composition
If the mask is fixed with tensile force applied, then the mask stability is improved, but the tensile force cannot be controlled and leads to mask discard
Solution Approach 1:
The movable members provide dynamic adjustment capability that allows control of tensile force and mask position. This enables the system to achieve stable fixation while maintaining reliability by adjusting parameters to prevent issues such as non-uniform pattern openings and pixel position inaccuracies, thereby reducing mask discard rates.
4Stability of the object's composition
If the mask is extended and welded, then the mask can be secured, but much time and effort are required and masks with problems are discarded
Solution Approach 1:
The movable members enable quick adjustment and repair of mask issues without requiring time-consuming re-welding operations. Masks with minor problems can be quickly repositioned and readjusted, eliminating the need to discard them and reducing the time and effort required for fixation while maintaining high productivity and mask utilization rate.
Data Source
AI summary
A mask assembly includes a frame for forming an opening, and a mask fixed to the frame while a tensile force is applied thereto and forming a plurality of pattern openings. The frame includes a frame main body for forming an opening, and a plurality of moving members installed to be movable in at least one direction on the frame main body. The mask is fixed to the moving members while a tensile force is applied thereto.