Multi-Layer Mask Assembly for Display Deposition Shadow Reduction

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Solution Overview

Problem

Existing mask assemblies for depositing materials in display apparatus manufacturing often suffer from reduced deposition quality due to shadow phenomena and inadequate contact with the substrate.

Innovation Solution

A mask assembly comprising a mask frame with an opening region covered by a first mask sheet, which includes multiple layers with ribs and openings, and a second mask sheet welded to the first mask sheet, enhancing contact and reducing shadows.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a simple mask structure is used, then manufacturing is easier, but deposition quality deteriorates due to shadow phenomena

Engineering Contradiction:
Improvemask assembly manufacturingVSAvoiddeposition quality
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The mask sheet is divided into multiple layers (first mask sheet with ribs and openings, second mask sheet with pattern holes) that work together to eliminate shadow phenomena while maintaining manufacturing feasibility

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The mask structure transitions from a single-plane design to a multi-layer three-dimensional structure, where the first mask sheet provides structural support and the second mask sheet provides precise patterning, thereby improving deposition quality without excessive manufacturing complexity

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If the mask assembly is positioned closer to the substrate, then deposition quality improves, but shadow phenomena increase

Engineering Contradiction:
Improvedeposition qualityVSAvoidshadow phenomena
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The mask system is segmented into two functional layers: the first mask sheet with a grid of ribs and openings that provides structural integrity and reduces shadowing, and the second mask sheet with pattern holes that enables precise material deposition

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the mask assembly have different properties - the first mask sheet provides mechanical support and general shadow reduction, while the second mask sheet provides localized precise patterning where material deposition is required

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The improved mask assembly enhances deposition quality by minimizing shadow effects and ensuring better contact with the display substrate, leading to more uniform and efficient material deposition.

Implementation Method 1

a second layer on a first surface of the first layer and extending around the first openings

Methodology Applied
Scientific EffectStructural support:

Implementation Method 2

a first weld portion on the second layer exposed through the first through portion

Methodology Applied
Scientific EffectWelding: Welding

Implementation Method 3

The deposition material may be ejected from (or emitted by) a deposition source and deposited on a display substrate through a mask assembly

Methodology Applied
Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentUS20250115987A1Mask assembly and method of manufacturing the same
Publication Date: 2025.04.10 SAMSUNG DISPLAY CO LTD
  • US20250115987A1 patent drawing
  • US20250115987A1 patent drawing
  • US20250115987A1 patent drawing

AI summary

A mask assembly includes: a mask frame having an opening region; and a first mask sheet covering the mask frame. The first mask sheet includes: a first layer including a plurality of first ribs extending in a first direction and a plurality of second ribs extending in a second direction crossing the first direction and having a plurality of first openings defined by the first ribs and the second ribs; a second layer on a first surface of the first layer and extending around the first openings; and a third layer on a second surface of the first layer and having a plurality of pattern holes overlapping the first openings.