Mask Assembly Tensioning With Two-Sided Alignment Control
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Solution Overview
Problem
Existing mask assembly manufacturing processes face challenges in achieving a high degree of freedom for proportion and shape, leading to alignment errors and increased manufacturing costs due to the requirement for four-sided tension, which is costly and reduces pixel position accuracy.
Innovation Solution
A mask assembly manufacturing apparatus that uses a two-sided tension method, where the unit mask is tensioned only in one direction, reducing the tensile force required and improving alignment accuracy by using a tensioner with chucks connected to a vacuum pump to suction-hold and align the unit mask, and laser units for welding and cutting, allowing for various mask shapes and arrangements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If four-sided tension method is used to manufacture mask assembly, then alignment precision can be maintained, but manufacturing cost increases and degree of freedom for proportion and shape is limited
Solution Approach 1:
The patent extracts the tension application from two dimensions (four-sided tension) to one dimension (two-sided tension), simplifying the system while maintaining functionality. By applying tension only in the row direction rather than both row and column directions, the device complexity is reduced and adaptability for various mask shapes is improved.
Solution Approach 2:
Instead of applying tension uniformly in all directions (conventional approach), the patent inverts the approach by applying tension selectively in only one direction (row direction). This inversion allows for greater flexibility in mask design while reducing the complexity of the tension application system.
2Reliability
If four-sided tension method is used, then mask alignment is stable, but tensile force requirement increases manufacturing cost
Solution Approach 1:
The patent extracts the essential tension function from a two-dimensional application (four-sided) to a one-dimensional application (two-sided). By removing the unnecessary column-direction tension while maintaining row-direction tension, the required tensile force is reduced by about ten times while alignment stability is preserved.
3Ease of operation
If four-sided tension method is used, then comprehensive control is achieved, but pixel position accuracy decreases
Solution Approach 1:
The patent inverts the conventional comprehensive control approach by demonstrating that selective control in one direction (row tension) is sufficient for achieving high pixel position accuracy. This inversion shows that over-control in all directions is unnecessary and may actually harm precision.
4Productivity
If conventional mask assembly process is used, then manufacturing process is established, but production efficiency is reduced due to alignment errors
Solution Approach 1:
By extracting and eliminating the unnecessary column-direction tension component, the patent reduces alignment errors and improves pixel position accuracy. This leads to reduced manufacturing costs and improved production efficiency, as masks can be manufactured with higher precision without requiring complex four-sided tension systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The two-sided tension method reduces the tensile force by about ten times, minimizes alignment errors to 0.3 micrometers, and enhances the reliability of the deposition process, enabling the production of masks with various proportions and shapes while reducing manufacturing costs and increasing production efficiency.
Implementation Method 1
a vacuum pump connected to the first chuck and the second chuck. Each of the first chuck and the second chuck may include a suction-holding part and a connection part connecting the suction-holding part and the vacuum pump
Implementation Method 2
One of the first laser part and the second laser part welds the unit mask to the open mask
Implementation Method 3
the other of the first laser part and the second laser part cuts the holding area of the unit mask
Data Source
AI summary
A mask assembly manufacturing apparatus includes a stage and a tensioner. A preliminary mask assembly including an open mask including a first opening and a second opening and a frame connected to the open mask disposed on the stage. The tensioner tensions a unit mask including a cell area including deposition openings and a holding area extending from the cell area, in a first direction. The cell area has a first width parallel to the first direction and a second width parallel to the second direction intersecting the first direction and greater than the first width.