Semiconductor Optical Measurement Using Mask-Based Transistor Positioning
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Solution Overview
Problem
Existing optical measurement techniques for semiconductor devices require design data to set the optical measurement target position, which is not always available, making defect analysis challenging.
Innovation Solution
An optical measurement method that uses mask data to identify the position of transistors in a semiconductor device, setting these positions as optical measurement targets, and performing optical measurement to analyze defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If design data is used to set optical measurement target position, then measurement precision is improved, but availability of required data deteriorates (design data is not always available)
Solution Approach 1:
The patent uses mask data (a copy or representation of the semiconductor device layout) to identify transistor positions instead of requiring the original design data. The control device extracts gate layer polygon data from the mask data to determine measurement target positions, effectively using an available copy (mask data) in place of the unavailable original (design data).
Solution Approach 2:
The patent introduces mask data as an intermediary between the unavailable design data and the optical measurement process. The control device processes mask data to extract gate layer information and identify transistor positions, using this intermediate data source to bridge the gap when design data is not available.
2Measurement precision
If design data is required for defect analysis, then measurement precision is improved, but ease of operation deteriorates (operator cannot perform measurement without design data)
Solution Approach 1:
The system replaces the need for design data with mask data, which is already available in the manufacturing workflow. The control device processes this existing copy (mask data) to automatically identify measurement targets, eliminating the operational barrier of requiring additional design data while maintaining measurement precision.
Solution Approach 2:
The control device automatically extracts gate layer polygon data from the mask data and identifies transistor positions without requiring operator intervention or additional design data. The system serves itself by using the already-available mask data to complete the measurement setup process.
3Adaptability or versatility
If mask data is used instead of design data, then adaptability is improved (can work with available data), but measurement precision may deteriorate (mask data vs design data)
Solution Approach 1:
The patent uses mask data as a copy of the semiconductor device layout to identify transistor positions. By extracting gate layer polygon data from this copy, the system achieves adaptability to work with available data while maintaining sufficient precision for defect analysis through automated position identification.
Solution Approach 2:
The system changes the data source parameter from design data to mask data, and adjusts the processing method accordingly by extracting gate layer polygon data and identifying transistor positions based on this alternative data format, thereby achieving adaptability without significant precision loss.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate defect analysis even when only mask data is available, allowing for efficient identification and measurement of defective parts in semiconductor devices.
Implementation Method 1
an optical measurement method for performing optical measurement for a semiconductor device... a measurement step of performing the optical measurement for the optical measurement target position set in the setting step
Data Source
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AI summary
A semiconductor device inspection apparatus includes: a light sensor that detects light from a semiconductor device as a DUT to which an electric signal has been input; an optical system that guides light from the semiconductor device to the light sensor; and a control device electrically connected to the light sensor. The control device includes: a data reading unit that reads mask data indicating a mask layout of the semiconductor device; a search unit that searches for a position of a transistor in the semiconductor device on the basis of polygon data of a gate layer of the semiconductor device included in the mask data; a setting unit that sets the searched position of the transistor as an optical measurement target position; and a measurement unit that performs optical measurement for the set optical measurement target position to acquire a measurement result.