Mask Blank Container Variable Distance Fixing Mechanism
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Solution Overview
Problem
Conventional mask blank containers generate dust and particles during opening and closing, leading to high probability of foreign matter adhesion to the mask blank, which can cause defects in the pattern formed on the transfer mask.
Innovation Solution
A mask blank container with a cap and container body that utilize a variable distance engaging mechanism, such as a rotatable fixing member with U-shaped and S-shaped sections, to minimize friction and dust generation during opening and closing, and an elastic member for improved sealability, along with supporting members made of resin materials to securely hold the mask blank.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional container with fitted cap and container body is used, then the mask blank is securely housed, but dust and particles are generated during opening and closing, leading to foreign matter adhesion
Solution Approach 1:
A resin layer is introduced as an intermediary substance between the cap and container body contact surfaces. This resin layer absorbs friction during opening/closing operations, preventing direct metal-to-metal or hard plastic-to-hard plastic contact that generates dust and particles, while still allowing the cap and container body to be securely fitted together
Solution Approach 2:
The surface properties of the cap and container body are modified by coating them with resin material. This changes the friction characteristics and material composition of the contact surfaces, transforming them from dust-generating hard surfaces to low-friction resin surfaces that prevent particle generation during relative movement
2Strength
If the cap and container body are fitted tightly, then fixation is secure, but friction during opening and closing generates particles that adhere to the mask blank
Solution Approach 1:
The resin layer serves as a mediator that maintains the tight fit between cap and container body while eliminating the harmful frictional contact. The resin deforms elastically during opening/closing, allowing secure fixation without generating particles that would compromise mask blank cleanliness
Solution Approach 2:
The container system combines different materials (container body material, cap material, and resin coating material) to achieve complementary properties: structural strength for secure fixation and low-friction surface properties for particle-free operation during opening and closing
Data Source
AI summary
A mask blank container adapted to house a mask blank with a resist film. The container comprises a container body 5 for receiving the mask blank; a cap member 6 to be put on the container body; and a fixing member 9 adapted to fix the container body and the cap member to each other when the cap member is put on the container body. The container body and the cap member have fitting portions 51 and 61 made of a resin material and fitted to each other, respectively. The fixing member comprises a first member 91 having an engaging portion 91 a to be engaged with the fitting portion of the cap member, and a second member 92 having an engaging portion 93 to be engaged with the fitting portion of the container body. A distance between the engaging portions of the first and the second members is desired to be variable.