Mask Blank Substrate Markers for Automated Orientation Management
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Solution Overview
Problem
In mask blank manufacturing, the variation in orientation of markers on end faces of substrates complicates the identification and management of individual mask blanks, making it difficult to automate the manufacturing process and accurately form patterns while avoiding defective portions.
Innovation Solution
A method of forming unique markers on each of the four end faces of a substrate, including a common marker portion and an end face unique marker portion, which allows for consistent orientation and identification, enabling proper rotation and management of mask blanks during the manufacturing process, even when rotated.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If a marker is formed on an end face of a substrate for identifying or managing the substrate, then the substrate can be identified and managed, but when the orientation of the substrate is changed, the orientation of the end face with the marker also changes, making it difficult to manage the substrates and automate the manufacturing process
Solution Approach 1:
The patent transitions from marking only one end face to marking all four end faces of the rectangular substrate. This dimensional expansion ensures that regardless of how the substrate is rotated, a marked end face remains accessible for marker reading, thereby enabling automation while maintaining ease of management.
Solution Approach 2:
Each end face is equipped with a marker, making the substrate universally identifiable from any orientation. This multi-facial marking system allows the substrate to be managed and identified regardless of its rotational position, supporting both automation and ease of operation.
2Manufacturing precision
If the orientation of the mask blank is changed to avoid defective portions, then pattern formation can be performed while avoiding defects, but the orientation of the end face formed with the marker also changes, making it difficult to automatically read the markers
Solution Approach 1:
By placing markers on all four end faces rather than one, the system ensures that marker reading can occur from any rotational orientation of the substrate. This allows the substrate to be rotated to avoid defects while maintaining the ability to automatically read markers from the newly positioned end face.
Solution Approach 2:
The marker reading system is designed to dynamically adapt to the substrate's rotational position by reading from whichever end face is currently accessible. This dynamic approach allows continuous marker reading capability regardless of substrate orientation changes made to avoid defects.
Data Source
AI summary
An object of this invention is to properly identify or manage mask blank substrates, mask blanks, and so on. A manufacturing method of a mask blank substrate (10) includes a substrate preparing step of preparing a plate-like substrate with a square main surface (102), and a marker forming step of forming a marker (106a to 106d) for identifying or managing the substrate on each of at least a plurality of end faces among four end faces (104a to 104d) of the substrate. The four end faces are continuous with sides of the main surface, respectively.