Mask Case Sliding Lock Mechanism for Automated Handling
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Solution Overview
Problem
Current mask handling processes in semiconductor fabrication require manual labor, leading to inefficiencies and the need for automated solutions that can securely and reliably manage blank masks during photolithography processes.
Innovation Solution
A mask case and automation apparatus with a lower and upper case, featuring sliding lock members and locking devices, which allow for automated locking and unlocking mechanisms to securely convey and handle blank masks within the system, enhancing stability and automation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual handling methods are used for blank masks, then operational flexibility is maintained, but productivity is low and labor efficiency is poor
Solution Approach 1:
The mask case is designed with self-locking and self-unlocking mechanisms that automatically secure the mask and enable automated handling by the apparatus, eliminating the need for manual intervention in the locking process and improving productivity
Solution Approach 2:
Manual mechanical locking operations are replaced with an automated locking mechanism integrated into the mask case structure, which works in conjunction with the automation apparatus to handle masks without human intervention, thereby increasing productivity
2Extent of automation
If a standardized mask case is designed for automation, then automation compatibility is improved, but device complexity increases
Solution Approach 1:
The mask case is divided into separate components including the case body, removable upper case, and integrated locking mechanisms, allowing each part to be optimized for automated handling while maintaining overall system compatibility without excessive complexity
Solution Approach 2:
The mask case is designed with universal features that enable it to be handled by various automated apparatuses through standardized interfaces and locking mechanisms, making the case compatible with multiple automation systems while avoiding overly complex design
3Reliability
If secure locking mechanisms are implemented, then reliability of mask handling is improved, but ease of operation decreases
Solution Approach 1:
The locking mechanism automatically secures the mask case without requiring manual intervention, and the removable upper case can be easily detached and reattached by automated apparatuses, maintaining both reliability and ease of automated operation
Data Source
AI summary
A mask case includes a lower case including a first side surface and a second side surface opposite each other, a first rail on the first side surface, and a second rail on the second side surface, an upper case separable from the lower case, and includes third and fourth side surfaces corresponding to the first and second side surfaces, a third rail on the third side, and a fourth rail on the fourth side, a first sliding lock member slidable along the first and third rails, and a second sliding lock member slidable along the second and fourth rails, first and second holes for coupling first and second pins of first and second locking open and close devices are in the first and second sliding lock members, and the first and second sliding lock members are slid by the first and second locking open and close devices.