Mask Clamping Apparatus Sagging Prevention

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Solution Overview

Problem

In the manufacturing of organic light emitting diode displays, deposition masks experience sagging due to the excess material not supported by the mask frame, which complicates the clamping process and maintains the effective and non-effective areas non-coplanar, requiring vertical movement during clamping.

Innovation Solution

A mask clamping apparatus with a sagging prevention unit that applies a force to the non-effective area of the mask sheet, either by spraying gas from the lower to the upper portion or drawing gas from the lower to the upper portion, preventing sagging and allowing clamping only in a parallel direction, thus maintaining the effective and non-effective areas coplanar.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the mask sheet size is larger than the mask frame to provide non-effective area for clamping, then the mask sheet can be securely clamped, but the non-effective area sags downward due to lack of support

Engineering Contradiction:
Improveclamping securityVSAvoidflatness of non-effective area
Core Design Contradiction:
ReliabilityVSShape

Solution Approach 1:

The patent introduces a gas pressure application mechanism that applies upward pressure to the non-effective area of the mask sheet, counteracting the downward gravitational force causing sagging. This creates a force balance where the gas pressure supports the mask sheet in the region extending beyond the mask frame, preventing deformation while maintaining the necessary clamping area.

Inventive Principle:
Principle #8Anti-weight (Counterweight)

Solution Approach 2:

The patent utilizes pneumatic pressure to support the non-effective area of the mask sheet. A gas supply system delivers pressurized gas to the region beyond the mask frame, creating a cushion of pressure that prevents sagging. This pneumatic support allows the mask sheet to maintain its flatness while extending beyond the physical boundaries of the mask frame for proper clamping.

Inventive Principle:
Principle #29Pneumatics and hydraulics

2Shape

If the clamping unit applies pressure to prevent sagging, then flatness is maintained, but the clamping mechanism becomes more complex

Engineering Contradiction:
Improvecoplanarity of effective and non-effective areasVSAvoidclamping apparatus structure
Core Design Contradiction:
ShapeVSDevice complexity

Solution Approach 1:

The patent introduces gas as an intermediary medium between the clamping system and the mask sheet. Instead of direct mechanical contact for support, pressurized gas acts as a mediator that provides uniform pressure distribution to prevent sagging. This intermediary approach simplifies the overall system by replacing complex mechanical support structures with a more straightforward pneumatic pressure application mechanism.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively prevents sagging of the non-effective area, enabling the clamping unit to move parallel to the mask sheet without vertical movement, ensuring the flatness and coplanarity of the mask sheet areas, facilitating a more efficient and precise clamping process.

Implementation Method 1

spraying a gas from a lower portion to an upper portion toward the non-effective area of the mask sheet

Methodology Applied
Scientific EffectGas pressure: Pressure Increase

Implementation Method 2

drawing a gas from a lower portion to an upper portion away from the non-effectively area

Methodology Applied
Scientific EffectGas suction: Pressure Drop

Data Source

PatentUS9500962B2Mask clamping apparatus and method of manufacturing mask
Publication Date: 2016.11.22 SAMSUNG DISPLAY CO LTD
  • US9500962B2 patent drawing
  • US9500962B2 patent drawing
  • US9500962B2 patent drawing

AI summary

A manufacturing method of a mask includes aligning a mask sheet including an effective area and a non-effective area, on a mask frame; applying a pressure to the non-effective area of the mask sheet in a direction opposite to a sagging direction of the non-effective area, to prevent sagging of the non-effective area; and moving a clamping unit to the mask sheet along a direction substantially parallel to the mask sheet, to clamp the clamping unit onto the non-effective area of the mask sheet.