Mask Cleaning Apparatus Induction Heating Ultrasonic Cavitation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing mask cleaning methods struggle to effectively remove solution residues from the gaps between mask sticks and the spaces between the mask and its frame, especially during the reuse of masks in electronic component manufacturing.
Innovation Solution
A mask cleaning apparatus featuring a cleaning bath with an induction heating member, which includes multiple heating coils and a waterproof layer, and an ultrasonic wave generator, allowing for efficient heating of the mask with low power and enhanced ultrasonic cleaning efficacy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If chemical wet cleaning method is used, then cleaning capability is improved, but cleaning effectiveness in gaps and spaces remains insufficient
Solution Approach 1:
The patent combines chemical wet cleaning method with ultrasonic waves to create a hybrid cleaning system. The cleaning apparatus includes both a cleaning solution supply system and an ultrasonic wave generator, merging two different cleaning mechanisms to achieve comprehensive cleaning coverage including hard-to-reach gaps and spaces between mask and frame.
Solution Approach 2:
The patent introduces ultrasonic waves to generate mechanical vibration in the cleaning solution. This vibration creates cavitation bubbles that collapse to produce localized high-pressure jets, mechanically dislodging contaminants from mask surfaces, gaps, and spaces that chemical cleaning alone cannot effectively remove.
2Temperature
If conventional heating method is used, then mask temperature is increased, but power consumption is high
Solution Approach 1:
The patent uses ultrasonic waves to generate mechanical vibration that directly agitates the mask surface and cleaning solution. This mechanical energy transfer heats the mask more efficiently than conventional thermal conduction methods, achieving the required temperature increase with lower overall power consumption by targeting energy delivery precisely where needed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus efficiently heats the mask with low power, improving cleaning efficiency and effectively removing solution residues from the gaps between mask sticks, while also enhancing the cleaning power through temperature increase and ultrasonic waves.
Implementation Method 1
Each of the first heating member and the second heating member may generate heat by an induced current flowing in a resistor inside each of the first heating member and the second heating member
Implementation Method 2
Each of the first heating member and the second heating member may generate heat by an induced current flowing in a resistor inside each of the first heating member and the second heating member
Implementation Method 3
The ultrasonic wave generator may be disposed between the first heating member and the second heating member in plan view
Implementation Method 4
The ultrasonic wave generator may generate ultrasonic waves
Data Source
AI summary
A mask cleaning apparatus includes a cleaning bath including an accommodating space in which a cleaning solution is stored, a transfer robot transferring a mask, and an induction heating member disposed inside the accommodating space. The cleaning bath includes at least one side and a bottom surface, which define the accommodating space. The induction heating member includes a first heating member, a second heating member, and a waterproof layer covering the first heating member and the second heating member.