Mask Defect Testing Apparatus with Inclined Clamp
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Solution Overview
Problem
Existing mask defect test apparatuses are limited in their ability to precisely and stably test metal masks due to the protruding structure of the jig's clamp, which restricts the camera's approach and hinders accurate detection of defects, especially at the edge portions of the metal mask.
Innovation Solution
A mask defect test apparatus featuring a tension jig unit with a supporter, clamp parts, and a tension part that applies tension to the metal mask, allowing the mask to be bent at a predetermined angle (10° to 30°) and fixed with an inclined clamp surface, combined with a test unit including a camera and illuminating unit, which can approach the mask without colliding with the jig, enabling precise detection of defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the camera approaches the metal mask closer to improve defect detection ability, then the detection precision is improved, but the camera collides with the protruding clamp structure of the jig
Solution Approach 1:
The clamp part is designed to extend in the horizontal direction rather than vertically, changing the spatial dimension of the constraint. This allows the camera to approach the metal mask from above without collision, as the clamp structure is positioned laterally away from the camera's vertical approach path.
Solution Approach 2:
The jig structure is divided into separate functional components: the supporter holds the metal mask, while the clamp part extends horizontally to secure the edges. This segmentation allows the camera to access the metal mask surface independently from the clamp structure, eliminating the collision problem while maintaining secure fixation.
2Reliability
If the clamp part is designed to securely fix the metal mask, then the fixation reliability is improved, but the camera's approach range is limited
Solution Approach 1:
The clamp part extends in the horizontal direction rather than vertically, changing the spatial dimension of the constraint. This allows the camera to approach the metal mask from above without collision, as the clamp structure is positioned laterally away from the camera's vertical approach path.
3Reliability
If the metal mask is fixed using a conventional jig with upward-protruding clamp, then the mask is securely held, but the edge portion of the mask cannot be precisely tested
Solution Approach 1:
The jig structure is divided into separate functional components: the supporter holds the metal mask, while the clamp part extends horizontally to secure the edges. This segmentation allows the camera to access the metal mask surface independently from the clamp structure, eliminating the collision problem while maintaining secure fixation.
Solution Approach 2:
The clamp part is designed to extend in the horizontal direction rather than vertically, changing the spatial dimension of the constraint. This allows the camera to approach the metal mask from above without collision, as the clamp structure is positioned laterally away from the camera's vertical approach path.
Data Source
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Figure 3~4
AI summary
A mask defect test apparatus, including a tension jig unit having a supporter on which a metal mask to be tested is located, a clamp part disposed at both sides of the supporter to fix opposite edges of the metal mask, and a tension part to apply a tension force to the metal mask fixed by the clamp part; and a test unit to test the metal mask fixed by the tension jig unit. A vertical distance between the metal mask located on the supporter and the test unit is less than or equal to a vertical distance between the tension jig unit and the test unit.