Mask Fork Anti-Collision Members for Photolithography Transfer
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Solution Overview
Problem
Masks for photolithography are fragile and prone to damage during transfer due to collisions, particularly from a mask box to a mask stage through a standard mechanical interface (SMIF) pod and within the mask library.
Innovation Solution
A mask fork with anti-collision members and a mask box designed to prevent collisions by forming a groove with limiting sections, ensuring that anti-collision members collide before the mask does, along with an actuator assembly and sensors for precise control and safety during transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the mask is transferred directly from the mask box to the mask stage without protective structures, then the transfer process is simple and fast, but the mask is prone to collision damage
Solution Approach 1:
The patent introduces anti-collision members as intermediary protective structures between the mask and potential collision sources. These members extend from the fork body towards the mask, positioned to contact the mask first during transfer operations, thereby preventing direct contact between the mask and the fork body or other structures, reducing collision damage risk
Solution Approach 2:
The anti-collision members are designed to protrude beforehand during the mask transfer process, creating a protective buffer zone. The members extend from the fork body towards the mask position, ensuring that if a collision is to occur, the anti-collision members will be the first to contact, cushioning the impact before it reaches the mask
2Reliability
If anti-collision members are added to the mask fork, then collision protection is improved, but the device complexity increases
Solution Approach 1:
The anti-collision protection system is segmented into multiple independent members extending from different positions on the fork body. Each anti-collision member is a separate component that can be independently positioned and adjusted, allowing for modular design and easier maintenance while providing comprehensive protection around the mask transfer path
3Productivity
If the mask transfer path is simplified without protective structures, then the transfer speed is fast, but the risk of mask damage from collisions increases
Solution Approach 1:
The anti-collision members are positioned to exert a preliminary protective action during mask transfer. They extend into the transfer path beforehand, creating a protective barrier that actively prevents collisions before they can occur, rather than reacting after damage has happened. This allows fast transfer speeds while maintaining safety
Data Source
AI summary
A mask fork, configured to transfer a mask from a standard mechanical interface pod. The standard mechanical interface pod includes a plurality of supports having a L-shaped cross section. Each of the plurality of supports includes a connecting section extending horizontally and a supporting section extending vertically, and the connecting section has a bottom to which a limiting section is fixed. The mask fork includes a fork body and two tines connected to the fork body in symmetry with each other. Each of the tines comprises a transfer member configured to support the mask during a transfer of the mask and anti-collision members including a first anti-collision member extending horizontally and a second anti-collision member extending vertically. The first anti-collision member is horizontally attached to a side of the transfer member facing away from the mask.