Mask Frame Air Tunnels for Rapid Cleaning Liquid Evaporation
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Solution Overview
Problem
In the manufacturing of organic light-emitting diode displays, residual cleaning liquid in the fine gaps between the mask and frame of the mask frame assembly hinders efficient drying, leading to delayed reuse and reduced operation efficiency due to variations in vacuum degree during subsequent deposition processes.
Innovation Solution
The incorporation of air tunnels in the connection parts between the mask and frame facilitates rapid evaporation of cleaning liquid by allowing air flow through these channels, either in the mask, frame, or both, thereby reducing the time needed for drying and improving productivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the mask frame assembly is cleaned using cleaning liquid, then the mask and frame are cleaned, but cleaning liquid remains in the fine gaps between the mask and frame, causing delayed drying and reduced operation efficiency
Solution Approach 1:
The frame is designed with air tunnels (porous structure) that allow air to flow through the fine gaps between the mask and frame, facilitating rapid evaporation of cleaning liquid while maintaining effective cleaning
Solution Approach 2:
Air is introduced through the air tunnels in the frame to create airflow that carries away cleaning liquid from the fine gaps, using pneumatic principles to accelerate the drying process
2Productivity
If the mask frame assembly is dried using an air knife, then the surface is dried, but cleaning liquid in the fine gaps between the mask and frame does not readily dry
Solution Approach 1:
The frame is segmented with multiple air tunnels distributed throughout the structure, allowing air to reach cleaning liquid in various locations within the fine gaps, ensuring complete drying throughout the assembly
Solution Approach 2:
The drying approach is changed from surface-level air knife drying to three-dimensional airflow through the air tunnels, enabling air to penetrate deep into the fine gaps and dry cleaning liquid from within
3Productivity
If the mask frame assembly with remaining cleaning liquid is used in a subsequent deposition process, then operation continuity is maintained, but the vacuum degree of the deposition chamber varies and deposition quality deteriorates
Solution Approach 1:
The air tunnels enable preliminary and complete drying of cleaning liquid before the deposition process begins, preventing vacuum degree variations and ensuring high deposition quality from the start
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The air tunnel design ensures rapid drying of cleaning liquid, allowing for quicker reuse of the mask frame assembly and preventing vacuum degree variations that could affect deposition quality, thereby enhancing operational efficiency and productivity.
Implementation Method 1
an air tunnel is formed in a connection part between the frame and the mask
Data Source
AI summary
A mask frame assembly includes an air tunnel between a frame and a mask so as to allow flow of air. Therefore, evaporation of cleaning liquid can be facilitated in gaps between the frame and the mask during cleaning and drying processes performed so as to reuse the mask frame assembly sooner. Thus, the amount of remaining cleaning liquid can be reduced so as to reduce the time necessary for preparation of a subsequent process using the mask frame assembly.