Large-Area Mask Frame Alignment for Precise Display Deposition
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The alignment of large-area masks in deposition apparatuses is often inaccurate, leading to deteriorated deposition accuracy of light emitting patterns in display panels.
Innovation Solution
A deposition apparatus with a mask frame supported by a pin unit and magnet unit, allowing independent movement of pins and magnets to adjust alignment, and adjustable blocks to enhance positional accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a large-area mask is used to improve production yield, then productivity is improved, but alignment accuracy deteriorates
Solution Approach 1:
The mask frame is divided into multiple portions (first, second, third, and fourth portions) that can be independently adjusted. This segmentation allows each portion to be individually positioned and aligned, enabling the large-area mask to maintain high deposition accuracy across its entire surface while preserving the productivity benefits of large-area processing.
Solution Approach 2:
The mask frame is designed with dynamic adjustment capabilities through movable pins and magnets that can be independently positioned. This dynamic system allows real-time alignment adjustments during the deposition process, ensuring that the large-area mask maintains precise positioning and improves deposition accuracy without sacrificing productivity.
2Area of stationary object
If the mask is made larger to increase coverage area, then productivity is improved, but alignment precision deteriorates
Solution Approach 1:
The large mask frame is segmented into multiple adjustable portions, each capable of independent positioning. This segmentation enables the large-area mask to maintain alignment precision by allowing individual portions to be precisely adjusted, effectively managing the complexity of aligning such a large structure.
Solution Approach 2:
The system incorporates adjustable pins and magnets that can be positioned based on alignment requirements, providing feedback mechanisms to ensure precise positioning. This feedback capability allows the large-area mask to maintain high alignment precision despite its increased size.
3Manufacturing precision
If multiple adjustable components are added to improve alignment, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The adjustment mechanism is segmented into discrete, independently controllable components (pins and magnets). This segmentation simplifies the control system by allowing each component to be adjusted independently, reducing the overall complexity of managing a multi-component alignment system while maintaining high manufacturing precision.
Solution Approach 2:
Different portions of the mask frame have different adjustment characteristics tailored to their specific locations. This local quality approach allows each portion to be optimized for its alignment requirements, improving overall precision while managing system complexity through localized rather than uniform adjustment mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves the alignment and deposition accuracy of large-area masks, ensuring precise formation of light emitting patterns in display panels.
Implementation Method 1
a magnet unit disposed on a rear surface of the stage and overlapping the mask frame
Data Source
AI summary
A deposition apparatus and a deposition method by using the deposition apparatus are provided. The deposition apparatus includes a mask including deposition openings, a mask frame supporting the mask and including first, second, third, and fourth portions and an opening overlapping the deposition openings and surrounded by the first, second, third, and fourth portions, a stage disposed on a rear surface of the mask frame, a pin unit connected to the stage, and a magnet unit disposed on a rear surface of the stage and overlapping the mask frame. The first portion and the second portion of the mask frame extend in a first direction, and the third portion and the fourth portion of the mask frame extend in a second direction intersecting the first direction, and the pin unit supports a side surface of the first portion of the mask frame and is movable in the second direction.