Mask Frame Alignment in Deposition Apparatus
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Solution Overview
Problem
As flat panel displays, such as LCDs and OLEDs, increase in size, the mask deposition method leads to non-uniformity of pattern openings and reduced pixel position accuracy due to mask frame twist and increased interval between the mask and substrate, causing defects in the deposition process.
Innovation Solution
A deposition apparatus that controls the tensile force applied to the mask frame by independently moving its upper and lower portions using motor-driven screw-thread mechanisms, minimizing twist and maintaining uniform tension to ensure precise alignment and deposition accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the mask size is increased for larger flat panel displays, then the deposition coverage is improved, but the mask frame twist increases causing reduced pixel position accuracy
Solution Approach 1:
The patent applies dynamics by making the mask frame adjustable through independent movement of upper and lower portions. The mask frame is no longer static but can be dynamically adjusted to maintain proper tension and alignment, resolving the twist issue that occurs with larger mask sizes
Solution Approach 2:
The mask frame is segmented into upper and lower portions that can be independently controlled. This segmentation allows differential adjustment of each portion to compensate for twist and maintain uniform tension across the entire mask frame, thereby preserving pixel position accuracy despite increased mask size
2Area of stationary object
If the mask size is increased for larger flat panel displays, then the deposition coverage is improved, but non-uniformity of pattern openings increases
Solution Approach 1:
The mask frame is made dynamically adjustable with independent control of upper and lower portions. This allows real-time adjustment to maintain uniform pattern openings across the entire mask surface, preventing the non-uniformity that would otherwise occur with larger mask sizes
Solution Approach 2:
Different portions of the mask frame (upper and lower) are given different adjustment capabilities. Each portion can be independently positioned to ensure that pattern openings remain uniform across the entire mask, addressing local variations that arise in larger masks
3Length of stationary object
If the interval between mask and substrate increases with larger displays, then the deposition process becomes more difficult, but mask frame twist is exacerbated
Solution Approach 1:
The mask frame is made dynamically adjustable to compensate for the increased interval. By independently moving upper and lower portions, the system can maintain proper alignment and tension even when the mask-substrate interval increases with larger display sizes
Solution Approach 2:
The patent changes the positional parameters of the mask frame by independently adjusting upper and lower portions. This parameter adjustment compensates for the increased interval effect, maintaining alignment accuracy despite the larger distance between mask and substrate
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces mask frame twist, compensates for increased intervals, and minimizes defects by maintaining precise alignment and uniform tension, enhancing the accuracy and productivity of the deposition process.
Implementation Method 1
motor-driven screw-thread mechanisms
Data Source
AI summary
A method of aligning a mask assembly includes: providing a mask assembly including a mask and a mask frame; and adjusting the mask frame by independently moving at least a position of a lower portion of the mask frame and an upper portion of the mask frame.