Mask Frame Bending Prevention via Dual-Sheet Segmentation
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Solution Overview
Problem
Existing masks used in deposition processes for display device manufacturing often face challenges with frame deformation during the deposition process, leading to precision and uniformity issues.
Innovation Solution
A mask design featuring a frame with defined first and second openings, a first mask sheet with deposition openings, and a second mask sheet made of a different material that contacts the edge portion of the frame, distributing bonding forces to prevent frame bending.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single mask sheet is used in the deposition process, then the device complexity is reduced, but the frame deformation occurs leading to poor manufacturing precision
Solution Approach 1:
The mask is divided into two separate mask sheets: a first mask sheet with deposition openings and a second mask sheet with dummy openings. This segmentation allows each sheet to serve a specific function - the first sheet enables material deposition while the second sheet prevents frame deformation, thereby resolving the contradiction between simplicity and precision.
Solution Approach 2:
Different regions of the mask structure are assigned different functions and materials. The first mask sheet region is designed for deposition (with openings), while the second mask sheet region is designed for structural support (with dummy openings). This local differentiation allows the mask to simultaneously achieve deposition precision and structural stability.
2Ease of manufacture
If the second mask sheet is made of the same material as the first mask sheet, then the manufacturing process is simplified, but the bonding force distribution is insufficient to prevent frame bending
Solution Approach 1:
The mask employs composite materials by using different materials for the first and second mask sheets. The second mask sheet is made of a material with superior bonding characteristics that can effectively distribute bonding forces to prevent frame bending, while the first mask sheet uses material optimized for deposition. This composite approach resolves the contradiction between manufacturing simplicity and structural performance.
3Ease of operation
If the second mask sheet does not contact the edge portion of the frame, then the alignment is easier, but the bonding force cannot be distributed to prevent frame deformation
Solution Approach 1:
The mask structure is segmented into functional zones: the second mask sheet is specifically positioned to contact the edge portion of the frame, creating a dedicated structural support zone that is separate from the deposition zone. This spatial segmentation allows the alignment process to focus on the deposition area while the edge contact provides automatic structural stabilization.
Data Source
AI summary
A mask includes a frame in which at least one first opening defined in a center portion of the frame and at least one second opening defined in an edge portion of the frame are defined, a first mask sheet disposed on the frame, and in which a plurality of deposition openings each overlapping the first opening is defined, and a second mask sheet surrounding at least a portion of the first mask sheet on the frame, and including a different material from a material of the first mask sheet.