Mask Plate Frame with Dual Recessed Portions for OLED Evaporation
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Solution Overview
Problem
In semiconductor manufacturing, particularly for OLED display screens, existing mask plates experience warps and folds due to unsupported edges and corners, leading to reduced evaporation yield and quality issues during the evaporation process.
Innovation Solution
A frame for the mask plate with continuous recessed portions for masks and supporting portions for shielding films, ensuring all edges and corners are securely fixed, preventing warps and folds, and enhancing the evaporation process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the groove is provided on the bottom surface of the recessed portion to accommodate the shielding film, then the shielding film can be positioned correctly, but the bottom surface becomes discontinuous causing mask edges and corners to be unsupported and warped
Solution Approach 1:
The recessed portion is segmented into two distinct levels: a first recessed portion for receiving masks and a second recessed portion for receiving the shielding film. This segmentation allows each component to be positioned at the appropriate depth without compromising the structural integrity and flatness of the mask plate surface.
Solution Approach 2:
The solution introduces a vertical dimension differentiation by creating two recessed portions at different depths. The first recessed portion sits at a higher level while the second recessed portion is deeper, allowing the shielding film to be positioned below the mask level without affecting the continuous support surface for mask edges and corners.
2Ease of manufacture
If tension is applied to flatten the masks during welding, then the masks can be welded to the frame, but inappropriate tension causes masks to fold and reduces evaporation yield
Solution Approach 1:
The masks are pre-stretched and flattened onto the continuous bottom surface of the first recessed portion before welding begins. This preliminary positioning ensures that masks are properly tensioned and flat from the start, eliminating the need for excessive tension during welding and preventing folds that would reduce evaporation yield.
3Ease of manufacture
If the shielding film is welded onto the frame first, then the masks can be welded subsequently, but this sequence requires a complex recessed portion structure with grooves that disrupts the support surface
Solution Approach 1:
The recessed portion is divided into two segments: the first recessed portion providing continuous support for mask edges and corners, and the second recessed portion accommodating the shielding film. This segmentation enables the shielding film to be positioned and welded without creating grooves that would disrupt the mask support surface.
Solution Approach 2:
The second recessed portion is nested within the first recessed portion, creating a hierarchical structure where the shielding film is positioned inside the larger recessed area. This nested arrangement allows both components to coexist without interfering with each other's support requirements.
Data Source
AI summary
The present invention discloses a frame for a mask plate and a mask plate. The frame comprises a frame body and a frame through hole passing through the frame body in the thickness direction, a first recessed portion being provided around the frame through hole at an inner periphery of the frame body, the first recessed portion having a continuous bottom surface for providing masks thereon, and a second recessed portion being provided inside the first recessed portion, the second recessed portion being used for providing a shielding film thereon so that the position of the shielding film corresponds to the positions of gaps between adjacent ones of the masks.