Mask Frame Flow Path Design for Deposition Contamination Control
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Solution Overview
Problem
Existing mask assembly technologies face challenges in preventing defects during bonding and contamination from organic materials during the deposition process, which affects the accuracy and reliability of the deposition process on substrates.
Innovation Solution
A mask frame and assembly design featuring a flow path with redirection portions and a bonding portion, where the flow path includes angled or curved openings to prevent organic material deposition and ensure tight adhesion using negative pressure, thereby improving deposition accuracy and preventing contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a mask is bonded to a mask frame using conventional bonding methods, then the mask can be attached to the frame, but bonding defects occur and substrates become contaminated with organic materials during the deposition process
Solution Approach 1:
The mask frame is divided into multiple functional regions: bonding portions for attaching the mask, flow paths for controlling gas flow, and redirection portions that divert organic materials away from the substrate deposition area. This segmentation allows each region to perform its specific function without interfering with others, preventing both bonding defects and contamination.
Solution Approach 2:
Redirection portions are introduced as intermediary structures between the bonding portions and the substrate deposition area. These redirection portions act as mediators that intercept and redirect organic materials before they can reach the substrate, while the flow paths serve as intermediaries to control the deposition process and prevent contamination.
2Ease of manufacture
If conventional mask frame designs are used, then manufacturing is simpler, but deposition accuracy deteriorates due to organic material contamination
Solution Approach 1:
The mask frame is segmented into bonding portions, flow paths, and redirection portions. Each segment can be manufactured using standard fabrication processes, and the overall structure can be assembled by bonding the mask to the frame. This segmentation maintains ease of manufacture while achieving high deposition accuracy through the coordinated function of each segment.
Solution Approach 2:
The redirection portions serve as intermediary structures that are integrated into the mask frame during manufacturing. These intermediaries are designed to intercept and redirect organic materials, preventing them from reaching the substrate and compromising deposition accuracy, while still being manufacturable using conventional techniques.
3Reliability
If the mask is tightly adhered to the mask frame, then bonding reliability improves, but the complexity of the mask frame structure increases
Solution Approach 1:
The mask frame is segmented into distinct bonding portions and functional flow paths with redirection portions. This segmentation allows the bonding portions to be optimized for strong adhesion to the mask, while the flow paths and redirection portions are designed to control gas flow and redirect organic materials. The modular structure maintains reliability while managing complexity through functional separation.
Solution Approach 2:
The mask frame structure is designed to perform multiple functions simultaneously: bonding portions provide mechanical attachment, flow paths control gas flow for deposition, and redirection portions intercept and redirect organic materials. This multi-functionality achieves tight adhesion and prevents contamination without requiring separate components for each function, thereby managing overall structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents defects in bonding and contamination, enhancing the accuracy and reliability of the deposition process by ensuring the mask is securely adhered to the frame and preventing organic material from reaching the substrate, thus maintaining the integrity of the deposition process.
Implementation Method 1
a first flow path extending through the mask frame; a negative pressure generating part, the first flow path connected to the negative pressure generating part to allow the mask to be adhered to the mask frame
Implementation Method 2
the first flow path includes a first redirection portion defined by the first opening and the second opening, and the first redirection portion having a shape in a cross-section perpendicular to the first surface, the shape being selected from bent, curved, cornered and angled
Data Source
AI summary
A mask frame includes a first surface facing a mask, a second surface extending from a side of the first surface at an angle, a third surface extending from another side of the first surface at an angle to define a frame opening, and a first flow path including a first opening defined through the first surface and extending in a first direction and a second opening extending the first opening, defined through the second surface, and extending in a second direction different from the first direction.