Deposition Mask Frame Alignment Using Segmented Force Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The alignment of masks in deposition apparatuses is often inaccurate, leading to deteriorated accuracy in the formation position of emission patterns on display panels.
Innovation Solution
A deposition apparatus with a mask frame and external force applying parts, including first to third portions, and independently movable sub-parts to adjust the mask's position and applied force, ensuring precise alignment and deposition accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a large-area mask is used to improve production yield, then the deposition area is increased, but the alignment accuracy deteriorates
Solution Approach 1:
The mask frame is divided into four separate portions (first, second, third, and fourth portions) that can be independently adjusted. This segmentation allows each portion to be precisely positioned and aligned separately, maintaining high alignment accuracy even when using a large-area mask to improve production yield.
Solution Approach 2:
The mask frame portions are made movable through external force applying parts that can adjust the position of each portion independently. This dynamic adjustment capability enables precise alignment to be achieved and maintained, resolving the contradiction between using a large-area mask for higher productivity and maintaining alignment accuracy.
2Device complexity
If the mask position is fixed to simplify the apparatus, then the device complexity is reduced, but the deposition accuracy deteriorates
Solution Approach 1:
The adjustment mechanism is segmented into multiple independent external force applying parts, each responsible for adjusting a specific portion of the mask frame. This segmentation makes the complex adjustment system more manageable and controllable, achieving high deposition accuracy without requiring an overly complicated unified adjustment mechanism.
Solution Approach 2:
Each external force applying part is designed to adjust a specific local portion of the mask frame with high precision. This local adjustment capability ensures that deposition accuracy is maintained in each specific area, while the overall apparatus structure remains relatively simple through modular design.
Data Source
AI summary
A deposition apparatus includes a mask, a mask frame, a stage disposed on a rear surface of the mask frame, and first to third external force applying parts disposed on the stage. Each of the first portion and the second portion includes a support and a driving part which moves the support. The first to third external force applying parts applies external force to the mask frame to control a shape of the mask frame.