Mask Hole Formation via Laser Ablation and Etchant Expansion
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Solution Overview
Problem
The manufacturing of masks for display devices faces challenges in precision and defect reduction, particularly due to contamination and oxide film formation during the laser-based hole formation process, which can lead to inaccurate shapes and increased manufacturing time.
Innovation Solution
A method involving the formation of a first hole in a base material using a laser, followed by expansion with an etchant to create a second hole that matches the desired slot size, thereby reducing defects and eliminating the need for separate oxide film removal processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a laser is used to form holes through base material, then hole formation speed is improved, but contamination and oxide film formation occur leading to reduced manufacturing precision
Solution Approach 1:
The patent converts the harmful oxide film formed during laser processing into a beneficial etching guide. The oxide film is intentionally retained and used as a mask during subsequent wet etching, ensuring that the etching process follows the desired pattern while removing the contamination issue rather than trying to prevent it
Solution Approach 2:
The patent introduces an intermediary wet etching process between laser hole formation and final mask completion. This intermediate step uses the oxide film as a temporary mask, allowing precise hole shape control while eliminating the direct conflict between fast laser processing and precision requirements
2Manufacturing precision
If multiple separate processes are used for hole formation and oxide removal, then manufacturing precision is improved, but manufacturing time increases
Solution Approach 1:
The patent merges the oxide film removal step with the hole formation and shaping process. Instead of separately forming holes and then removing oxides, the oxide film is utilized as an etching mask during wet etching, combining multiple functions into a single integrated process step that reduces total manufacturing time
Solution Approach 2:
The patent performs preliminary oxidation during the laser hole formation process, creating the oxide film in advance before the wet etching step. This preliminary action ensures that the mask is already in place when etching begins, eliminating the need for separate mask application steps and streamlining the overall process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances precision, reduces defects, and streamlines the manufacturing process by ensuring the second hole matches the intended slot size, improving the quality and efficiency of mask production.
Implementation Method 1
forming a first hole in a base material using a laser, the first hole penetrating through the base material from a first surface to a second surface different from the first surface
Implementation Method 2
expanding the first hole using an etchant to form a second hole
Data Source
AI summary
A method of manufacturing a mask includes forming a first hole in a base material using a laser, the first hole penetrating through the base material from a first surface to a second surface different than the first surface, and expanding the first hole using an etchant to form a second hole.