Dynamic Height Control for Mask Inspection Precision
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current mask inspection apparatuses are inadequate for precisely inspecting masks with sagging sheets or impurities due to fixed camera setups, leading to increased defect rates in OLED displays.
Innovation Solution
A mask inspection apparatus with a mask transfer unit, displacement sensor unit, photographic unit, control unit, and height control unit that dynamically adjusts the height and position of the photographic unit based on real-time distance measurements to maintain a consistent inspection range, allowing for precise inspection regardless of mask sag or impurities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If fixed cameras are used for mask inspection, then the device structure is simple, but the inspection precision deteriorates when mask sheets sag or have impurities
Solution Approach 1:
The patent applies the dynamics principle by making the photographic unit height-adjustable rather than fixed. The height control unit dynamically adjusts the position of the photographic unit based on real-time distance measurements from the displacement sensor, allowing the inspection system to adapt to sagging mask sheets and maintain optimal focus and inspection precision throughout the mask area.
Solution Approach 2:
The patent implements feedback control by using the displacement sensor to continuously measure the distance to the mask sheet and feeding this information back to the height control unit. This closed-loop feedback mechanism enables automatic adjustment of the photographic unit height to maintain consistent inspection quality across varying mask sheet positions.
2Reliability
If the photographic unit height is fixed, then the device complexity is reduced, but the inspection reliability deteriorates due to inability to accommodate mask sag
Solution Approach 1:
The height control unit dynamically adjusts the photographic unit position based on displacement sensor measurements, enabling the system to adapt to mask sheet sag and maintain reliable inspection throughout the mask area, thereby improving inspection reliability through dynamic positioning.
Solution Approach 2:
The patent changes the positional parameter of the photographic unit dynamically. By adjusting the height position of the photographic unit based on measured displacement, the system maintains optimal inspection conditions despite variations in mask sheet position, thereby improving inspection reliability.
3Measurement precision
If displacement sensor and height control are added, then the measurement precision is improved, but the device complexity increases
Solution Approach 1:
The patent replaces manual or fixed mechanical positioning with an automated control system. The displacement sensor and height control unit automatically adjust the photographic unit position based on measured displacement, eliminating the need for manual adjustment and improving measurement precision through automated feedback control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and efficient inspection of masks by maintaining a consistent distance and position, reducing defect rates and improving the ability to detect impurities across larger mask areas, even when the mask sags.
Implementation Method 1
a displacement sensor unit configured to measure a distance to a sheet of the mask transferred by the mask transfer unit
Data Source
AI summary
A mask inspection apparatus includes a mask transfer unit configured to transfer a mask in one of a first direction and a direction opposite to the first direction, a displacement sensor unit configured to measure a distance to a sheet of the mask transferred by the mask transfer unit, a photographic unit configured to photograph the sheet of the mask transferred by the mask transfer unit, a control unit configured to send a height control signal for controlling a height of the photographic unit according to the measured distance, and a height control unit configured to control the height of the photographic unit according to the height control signal sent by the control unit.