Mask Assembly With Integrated Sensors For Transfer Monitoring
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In the process of manufacturing display panels, defects can occur during substrate or mask transfer due to flaws or collisions, making it difficult to determine the cause and perform appropriate repairs, leading to increased costs and process complexities.
Innovation Solution
A mask and mask assembly equipped with sensors such as displacement, gyro, and vibration sensors, along with a communication transceiver and driving circuit, allowing for real-time monitoring of the transfer process, enabling early detection of issues and preventing damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If real-time monitoring is implemented in the mask and substrate transfer process, then defect detection capability is improved, but device complexity increases due to additional sensors and communication components
Solution Approach 1:
The sensor and communication transceiver are integrated within the mask structure itself, with the sensor housed in an accommodation space formed on the mask frame. This nesting approach allows monitoring components to be embedded within the existing mask geometry rather than adding external monitoring systems, thereby improving defect detection while minimizing increases in overall device complexity.
Solution Approach 2:
The mask structure is designed to serve multiple functions: it acts as both the patterning element for deposition and as a platform for real-time monitoring through integrated sensors. The accommodation space on the mask frame simultaneously provides structural support and houses the sensing components, enabling the mask to perform both its traditional function and monitoring function without requiring completely separate systems.
2Reliability
If sensors and communication transceivers are integrated into the mask, then real-time monitoring capability is improved, but manufacturing complexity increases
Solution Approach 1:
The accommodation space for the sensor is formed on the mask frame before the sensor itself is installed. This preliminary preparation of the mounting structure allows for easier integration of the sensor and communication transceiver during assembly, as the housing and positioning features are already in place. The mask frame is designed with the accommodation space as an integral feature, simplifying the overall manufacturing process despite the added monitoring functionality.
3Reliability
If the accommodation space is shielded from the outside, then sensor protection is improved, but vacuum compatibility becomes challenging
Solution Approach 1:
The accommodation space structure acts as an intermediary between the sensor and the external environment. It provides physical protection and shielding for the sensor while being designed to maintain vacuum compatibility through appropriate material selection and sealing arrangements. The accommodation space serves as a protective barrier that allows the sensor to function reliably during transfer operations in vacuum conditions without requiring the entire mask structure to be fundamentally redesigned for vacuum compatibility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables real-time monitoring of the mask and substrate transfer process, reducing the occurrence of defects, simplifying maintenance, and lowering operational costs by promptly identifying and addressing potential issues.
Implementation Method 1
The sensor may include at least one of a displacement sensor, a gyro sensor, and a vibration sensor
Implementation Method 2
The sensor may include at least one of a displacement sensor, a gyro sensor, and a vibration sensor
Implementation Method 3
The sensor may include at least one of a displacement sensor, a gyro sensor, and a vibration sensor
Data Source
AI summary
A mask, a mask assembly including a mask, and a substrate transfer apparatus including a mask. According to an embodiment, a mask includes a frame including an opening, accommodation structure disposed on the frame and including an accommodation space shielded from an outside, and a sensor disposed in the accommodation space.