Mask Manufacturing Method for Uniform Etching
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Solution Overview
Problem
The uneven thickness of metal masks during the manufacturing process leads to inconsistent opening sizes and shapes, affecting the reliability and quality of the mask.
Innovation Solution
A mask manufacturing method involving a metal substrate with virtual zones of different thicknesses, where nozzles spray an etching solution with varying pressures to ensure uniform etching, and a device with adjustable nozzles to achieve uniformity and quality improvement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional etching process is used on metal substrate with thickness variation, then etching can be completed, but the openings have different sizes and shapes due to uneven etching degree
Solution Approach 1:
The patent divides the metal substrate into multiple virtual zones based on thickness measurements, and assigns different spraying pressures to nozzles corresponding to each zone. Thicker regions receive higher spraying pressure while thinner regions receive lower pressure, ensuring uniform etching across the entire substrate despite thickness variations.
Solution Approach 2:
The patent employs adjustable nozzles that can dynamically change their spraying pressure according to the local thickness requirements of different virtual zones. This dynamic adjustment capability allows the etching process to adapt to varying substrate thickness in real-time, maintaining consistent opening dimensions throughout the mask.
2Manufacturing precision
If uniform etching is achieved by adjusting spraying pressure for different thickness zones, then opening uniformity is improved, but the device complexity increases due to multiple adjustable nozzles
Solution Approach 1:
The patent segments the metal substrate into multiple virtual zones based on thickness characteristics, with each zone assigned to specific nozzles. This segmentation allows the complex etching task to be divided into manageable regions, where each nozzle group handles a specific zone with tailored spraying pressure, reducing the overall system complexity compared to a fully uniform approach.
Solution Approach 2:
The patent designs nozzles with multi-functional capability, where each nozzle can adjust its spraying pressure to handle different thickness zones. This universal design allows a single nozzle system to perform multiple functions (etching different thickness zones with appropriate pressure), reducing the need for entirely separate nozzle systems for each zone and thereby reducing overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method and device enhance the uniformity of mask openings and improve the quality by reducing thickness differences and ensuring consistent opening sizes and shapes, resulting in improved manufacturing process reliability.
Implementation Method 1
the step of using the nozzles to spray the etching solution on the first surface of the metal substrate
Data Source
AI summary
A mask manufacturing method includes a step of providing a metal substrate having a plurality of virtual zones on its surface, using a plurality of nozzles to spray an etching solution on the surface, wherein the virtual zones include a first and a second zone, and the metal substrate has a first thickness and a second thickness respectively in an unit area of the first zone and the second zone, wherein the first thickness is greater than the second thickness; the step of using the nozzles to spray the etching solution on the surface further includes respectively using a first spraying pressure and a second spraying pressure to spray the etching solution on the first zone and the second zone, and the first spraying pressure is greater than the second spraying pressure. The invention also provides a mask manufacturing device.