Mask Assembly Opening Layout Correction Under Tension
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Solution Overview
Problem
The existing methods for manufacturing masks used in display panel production face challenges in achieving high precision for the opening areas, which affects the deposition quality of functional layers, due to limitations in processing precision and accuracy.
Innovation Solution
A method involving tensioning a mask sheet, connecting it with a mask frame, and defining opening processing areas with a specific sequence and correction based on cumulative deformation calculations to improve the size and position accuracy of the openings, using tensile forces and laser irradiation to form precise openings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a mask sheet is processed without tensioning and cumulative deformation correction, then the manufacturing process is simpler, but the opening area precision and deposition quality deteriorate
Solution Approach 1:
The mask sheet is tensioned before opening formation, and cumulative deformation is calculated and corrected in advance for each opening processing area. This preliminary preparation ensures that when openings are formed, the mask sheet is in a controlled state that minimizes deformation, thereby improving opening area precision without requiring complex real-time adjustments during processing
Solution Approach 2:
The method changes the physical state of the mask sheet by applying tension, which alters its mechanical properties and reduces deformation during opening formation. Additionally, the opening processing areas are corrected based on calculated cumulative deformation amounts, effectively compensating for expected deformations and maintaining high precision
2Measurement precision
If opening processing areas are defined without considering processing sequence and cumulative deformation, then the definition process is faster, but the position accuracy of openings deteriorates
Solution Approach 1:
A processing sequence is determined in advance for all opening processing areas, and cumulative deformation is calculated before actual opening formation. This allows the positions of all openings to be pre-corrected based on the anticipated deformation from the entire processing sequence, ensuring high position accuracy without requiring iterative adjustments during processing
Solution Approach 2:
The method incorporates a feedback mechanism where cumulative deformation is calculated based on the processing sequence, and this calculated deformation is used to correct the positions of opening processing areas. This closed-loop approach ensures that the final opening positions accurately match the intended design positions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the accuracy and reliability of the mask assembly, leading to improved deposition quality and precision in forming functional layers on the display panel.
Implementation Method 1
a first tensile force acts on the tensioned mask sheet in a direction substantially parallel to the first direction, an opening processing area which may be defined to form the opening having a first width in the first direction, has a second width in the first direction, and a difference between the first width and the second width may be proportional to the first tensile force
Implementation Method 2
defining opening processing areas in the tensioned mask sheet to form openings respectively corresponding to the opening processing areas
Data Source
Figure 1A
Figure 1B
Figure 2
AI summary
A manufacturing method of a mask assembly includes tensioning a mask sheet, connecting the tensioned mask sheet with a mask frame, and defining opening processing areas in the tensioned mask sheet to form openings respectively corresponding to the opening processing areas. The defining of the opening processing areas includes defining initial opening processing areas in the tensioned mask sheet in a first direction and in a second direction crossing the first direction to determine a processing sequence of the initial opening processing areas, calculating cumulative deformation amounts accumulated in each of the initial opening processing areas based on the processing sequence, and correcting a size and a position of each of the initial opening processing areas based on the cumulative deformation amounts.