Mask Plate Compensation Grooves for Display Substrate Precision
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Solution Overview
Problem
Existing mask plates used in display substrate manufacturing for 'full-screen' display devices face challenges in accurately controlling the positions and shapes of pattern openings due to inconsistent expansion-contraction ratios between low-density and high-density opening regions.
Innovation Solution
A mask plate design featuring at least one pattern region with a low-density opening region and a high-density opening region, where the ratio of pattern opening areas in the high-density region is greater than in the low-density region, and compensation grooves are introduced in the low-density region to enhance mechanical strength and uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the mask plate has uniform pattern opening density across the display region, then the manufacturing process is simple, but the sensor region cannot reserve enough transparent area for cameras and other sensors
Solution Approach 1:
The patent applies local quality by dividing the display region into different zones with different pattern opening densities. The first display region (sensor region) has a lower pattern opening density ratio to reserve transparent area for sensors, while the second display region has a higher pattern opening density ratio for better display resolution. This localized variation in opening density allows each region to fulfill its specific functional requirements.
2Manufacturing precision
If the mask plate has different pattern opening density ratios in different display regions, then the sensor region can reserve enough transparent area, but the positions and shapes of pattern openings cannot be accurately controlled due to inconsistent expansion-contraction ratios
Solution Approach 1:
The patent introduces compensation grooves in the first display region before the final stretching process. These grooves are pre-designed with specific shapes and dimensions to compensate for the expected expansion-contraction differences during the stretching process. By performing this compensation action in advance, the patent ensures that after stretching, the pattern openings in different regions maintain their intended positions and shapes with high accuracy.
Solution Approach 2:
The patent utilizes parameter changes by intentionally designing different expansion-contraction ratios for different regions through the compensation grooves. The grooves are configured to have specific geometric parameters that, when stretched, produce the desired compensation effect. This controlled parameter variation allows the mask plate to achieve both regional functional differentiation and overall dimensional accuracy.
3Adaptability or versatility
If the mask plate is stretched to accommodate different display regions, then regional functional requirements are met, but the inconsistent expansion-contraction ratios cause inaccurate pattern opening positions and shapes
Solution Approach 1:
The patent applies local quality by introducing compensation grooves specifically in the first display region where the expansion-contraction ratio differs from the second region. These grooves are localized structural features designed to provide differential compensation, allowing each region to undergo its required stretching while maintaining overall pattern accuracy.
Solution Approach 2:
The patent utilizes parameter changes by designing the compensation grooves with specific geometric parameters (shape, size, distribution) that correspond to the expected stretching parameters. By carefully controlling these parameters, the grooves compensate for the inconsistent expansion-contraction ratios during stretching, ensuring that the final pattern opening positions and shapes meet the required precision despite the regional differences in stretching behavior.
Data Source
AI summary
The disclosure provides a mask plate and a manufacturing method thereof. The mask plate includes at least one pattern region, each pattern region includes a first opening region and a second opening region which are adjacent to each other along a lengthwise direction of the mask plate, each of the first opening region and the second opening region has a plurality of pattern openings penetrating through the mask plate along a thickness direction of the mask plate, a ratio of a sum of areas of the pattern openings in the second opening region to a total area of the second opening region is greater than a ratio of a sum of areas of the pattern openings in the first opening region to a total area of the first opening region, the first opening region has grooves not penetrating through the mask plate.