Mask Plate With Gradient Absorbance Transmissive Member
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Solution Overview
Problem
Existing mask plate technologies face challenges in achieving precise control over linewidth due to light diffraction effects, resulting in irregularities and burrs on the resultant structures, particularly in high-resolution display panel manufacturing.
Innovation Solution
A mask plate design featuring a transmissive member with progressively increasing absorbance from the center to the edges, adjacent to a non-transmissive part, which helps control light diffraction and intensity distribution, allowing for accurate linewidth control and smoother lateral surfaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If traditional exposure and development processes are used, then the manufacturing process is simple, but light diffraction effect causes poor linewidth control
Solution Approach 1:
The transmissive member is designed with non-uniform absorbance distribution, where the absorbance progressively increases from the center region to the edge region. This local variation in optical properties allows different parts of the mask plate to perform different functions: the center region permits light transmission for pattern formation, while the edge region suppresses diffraction effects at the boundaries between transmissive and non-transmissive parts, thereby improving linewidth control without complicating the overall mask plate structure
Solution Approach 2:
The patent changes the absorbance parameter of the transmissive member spatially, creating a gradient from center to edge. This parameter change transforms the uniform transmissive member into a functionally differentiated component that can control light diffraction by adjusting the absorbance distribution, enabling precise linewidth control while maintaining process simplicity
2Manufacturing precision
If wing pattern mask design with sawtoothed edges is used, then linewidth control is improved, but burrs are generated on lateral surfaces
Solution Approach 1:
Instead of modifying the geometric shape of the mask plate edges (as in sawtoothed designs), this patent applies local quality variation to the transmissive member's absorbance property. The edge region of the transmissive member has higher absorbance to suppress diffraction, achieving linewidth control without altering the lateral surface geometry, thus avoiding burr formation while maintaining surface smoothness
Solution Approach 2:
The patent replaces the mechanical/geometric approach (sawtoothed edges) with an optical approach (absorbance gradient). By using the optical property of the transmissive member to control diffraction rather than mechanical edge geometry, the method achieves similar linewidth control效果 without the side effect of surface burrs, substituting a mechanical solution with an optical one
3Manufacturing precision
If SSM design with decreased non-transmissive part width is used, then narrow linewidth is achieved, but diffraction control becomes difficult
Solution Approach 1:
The transmissive member incorporates local quality variation with different absorbance in different regions. The edge region adjacent to the non-transmissive part has higher absorbance to suppress diffraction, while the center region maintains lower absorbance for light transmission. This local differentiation enables both narrow linewidth achievement and effective diffraction control simultaneously
Solution Approach 2:
The transmissive member can be implemented as a composite structure or material system that combines regions with different optical properties. This composite approach allows the integration of light-transmitting and diffraction-suppressing functions within a single component, achieving both narrow linewidth and controlled diffraction without requiring separate elements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables precise control over the linewidth of the resultant structure with fewer burrs, achieving uniform and narrow linewidths during the exposure and development processes.
Implementation Method 1
the absorbance of the transmissive member progressively increases in a direction away from a center region of the transmissive member to a edges region of the transmissive member close to the non-transmissive part
Implementation Method 2
Due to the diffraction effect of electromagnetic wave itself, it is difficult to realize a process for narrow linewidth in traditional exposure and development processes
Data Source
AI summary
Embodiments of the present invention disclose a mask plate and a manufacturing method thereof. The mask plate includes a mask plate body and a transmissive member, wherein the mask plate body has a transmissive part and a non-transmissive part adjacent to the transmissive part, the transmissive member is disposed corresponding to the transmissive part of the mask plate body, the absorbance of the transmissive member progressively increases in a direction away from a center region of the transmissive member to a edges region of the transmissive member close to the non-transmissive part.