Mask Plate Groove Array for OLED FMM Wrinkle Control

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Solution Overview

Problem

Fine metal masks used in OLED manufacturing for non-standard display shapes, such as circular, experience non-uniform strain and wrinkle issues during stretching, leading to poor masking performance.

Innovation Solution

A mask plate with an array of grooves and openings, where the openings are larger than the display region, and a protrusion around the edges, is used to support the fine metal mask and prevent non-uniform stress, allowing for uniform stretching and reduced sagging.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If FMM is stretched over circular or special-shaped display substrates, then the mask plate can accommodate various display shapes and sizes, but non-uniform strain and wrinkle occur leading to poor masking performance

Engineering Contradiction:
Improveadaptability to various display shapes and sizesVSAvoidmasking performance
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The mask plate surface is segmented into multiple regions with grooves dividing the continuous metal surface into discrete sections. This segmentation allows each segment to deform independently during stretching, preventing the accumulation of non-uniform strain that would otherwise cause wrinkles and maintain masking precision across various display shapes.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The grooves are strategically positioned to create regions of different mechanical properties across the mask plate surface. Areas with groove patterns have enhanced flexibility to accommodate local deformation requirements, while maintaining overall structural integrity. This local variation in mechanical properties enables the mask plate to adapt to different display geometries without compromising masking performance.

Inventive Principle:
Principle #3Local quality

2Ease of manufacture

If the mask plate structure is simplified for easy manufacturing, then manufacturing cost decreases, but the ability to prevent non-uniform strain and wrinkle is reduced

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidstrain uniformity and wrinkle prevention
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The groove parameters (depth, width, spacing, and pattern geometry) are optimized to achieve the desired mechanical performance. By carefully controlling these parameters, the mask plate gains the ability to prevent non-uniform strain and wrinkles while maintaining compatibility with standard manufacturing processes, thus balancing reliability and ease of manufacture.

Inventive Principle:
Principle #35Parameter changes

3Area of stationary object

If the opening size is increased to accommodate display regions, then evaporation coverage is improved, but the risk of deformation and wrinkle increases

Engineering Contradiction:
Improveopening area for evaporationVSAvoidstructural stability against deformation
Core Design Contradiction:
Area of stationary objectVSStability of the object's composition

Solution Approach 1:

The grooves are pre-formed on the mask plate surface before the evaporation process. This preliminary structuring creates a mechanical framework that guides and constrains the deformation behavior during subsequent stretching and evaporation operations, allowing larger opening areas while maintaining structural stability and preventing wrinkles.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS10934613B2Mask plate, mask plate assembly including mask plate and method for manufacturing same
Publication Date: 2021.03.02 BOE TECHNOLOGY GROUP CO LTD
  • US10934613B2 patent drawing
  • US10934613B2 patent drawing
  • US10934613B2 patent drawing

AI summary

A mask plate, a mask plate assembly including the mask plate, a method for manufacturing the mask plate and a method for manufacturing the mask plate assembly are provided according to the present disclosure. The mask plate is used in evaporating to the display substrate, and includes a plurality of grooves arranged in an array form and on a surface of the mask plate. An opening is arranged in the middle of each of the grooves, and the opening corresponds to a display region of a display substrate.