Deposition Mask Metal Plate Reflectance for Narrow Resist Adhesion
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
As pixel density increases in organic EL display devices, the narrow width of resist patterns on metal plates used in deposition masks requires high adhesion force, which is challenging to achieve due to reduced contact area, leading to instability in resist film adhesion and patterning accuracy.
Innovation Solution
A metal plate with specific surface reflectance characteristics, measured between 8% and 25% at a 45° incident angle, is used to enhance resist film adhesion and stability, allowing for precise formation of narrow resist patterns and through-holes, optimized through rolling and annealing processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the pixel density of organic EL display devices is increased, then the resolution and fineness of the display device is improved, but the width of resist patterns on the deposition mask must be narrowed, which reduces the contact area between the resist pattern and the metal plate, making it difficult to achieve sufficient adhesion force
Solution Approach 1:
The invention changes the physical and chemical parameters of the metal plate surface by controlling the composition ratio of Fe-Ni-Co alloy (specifically Fe: 5-30 mass%, Ni: 70-65 mass%, Co: 5-15 mass%) and controlling the surface reflectance (5-30%). This parameter optimization enhances the adhesion force between the resist film and metal plate surface, enabling stable resist pattern formation even at high pixel densities (800 ppi or more) where resist pattern width is narrowed.
2Manufacturing precision
If the width of resist pattern is narrowed to achieve higher pixel density, then the contact area between the resist pattern and the metal plate is reduced, but sufficient adhesion force is required for stable patterning
Solution Approach 1:
The invention optimizes the surface parameters of the metal plate by controlling the alloy composition (Fe-Ni-Co ratio) and surface reflectance (5-30%). This creates an optimal surface state that provides sufficient adhesion force even when the resist pattern width is narrowed for high pixel density applications, enabling precise pattern formation without compromising adhesion stability.
Solution Approach 2:
The invention uses a composite alloy material (Fe-Ni-Co) with specific composition ratios to create a metal plate with enhanced surface properties. The combination of these specific elements produces a surface that provides optimal adhesion characteristics for narrow resist patterns, solving the contradiction between pattern width reduction and adhesion force requirements.
3Reliability
If the surface reflectance of the metal plate is controlled within a specific range (5-30%), then the adhesion force of the resist film is enhanced, but requires precise control of rolling and annealing processes
Solution Approach 1:
The invention establishes specific parameter ranges for alloy composition (Fe: 5-30 mass%, Ni: 70-65 mass%, Co: 5-15 mass%) and surface reflectance (5-30%) that naturally provide optimal adhesion properties. By defining these parameter ranges, the invention simplifies process control while ensuring reliable resist film adhesion, as staying within these ranges guarantees the desired surface characteristics without requiring overly complex control mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The metal plate ensures stable resist pattern formation and improved adhesion, enabling the production of deposition masks with high pixel density and precise through-hole alignment, enhancing the manufacturing efficiency of organic EL display devices.
Implementation Method 1
a surface reflectance by regular reflection of light is 8% or more and 25% or less, the surface reflectance being measured when light is incident on a surface of the metal plate at an incident angle of 45°±0.2°
Implementation Method 2
optimized through rolling and annealing processes
Implementation Method 3
optimized through rolling and annealing processes
Data Source
AI summary
A metal plate includes a surface including a longitudinal direction of the metal plate and a width direction orthogonal to the longitudinal direction. A surface reflectance by regular reflection of a light is 8% or more and 25% or less. The surface reflectance is measured when the light is incident on the surface at an angle of 45°±0.2°. The light is in at least one plane orthogonal to the surface.