Display Mask Protective Layer Removal for Fine Pattern Integrity

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Solution Overview

Problem

The challenge in manufacturing masks for display panels is the high likelihood of damage to pattern layers during the process of removing protective layers due to increased resolution and decreased mask thickness.

Innovation Solution

The method involves forming a pattern layer on a base layer, followed by a protective layer with a low-k material, and then removing the protective layer using a laser lift-off process to minimize damage to the pattern layer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the mask thickness is decreased to achieve higher resolution, then the manufacturing precision is improved, but the pattern layer becomes more susceptible to damage during protective layer removal

Engineering Contradiction:

Improvemask pattern resolutionVSAvoidpattern layer integrity

Core Design Contradiction:

Manufacturing precisionVSReliability

Solution Approach 1:

A protective layer is introduced as an intermediary between the pattern layer and the external environment. This protective layer shields the thin pattern layer from mechanical damage during handling and processing, allowing the mask to achieve high resolution without compromising pattern integrity

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The protective layer is applied beforehand to cushion and protect the fragile pattern layer from potential damage during subsequent processing steps, particularly during the removal of the protective layer itself and during handling operations

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

2Manufacturing precision

If the mask thickness is decreased to achieve finer patterns, then the manufacturing precision is improved, but the pattern layer becomes more vulnerable to damage

Engineering Contradiction:

Improvepattern finenessVSAvoidpattern layer strength

Core Design Contradiction:

Manufacturing precisionVSStrength

Solution Approach 1:

The protective layer serves as a mediator that provides mechanical support and protection to the thin pattern layer, enabling the formation of finer patterns while maintaining pattern layer strength through the protective barrier

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The mask structure becomes a composite system combining the pattern layer with the protective layer, where the protective layer material properties complement the pattern layer to provide both fineness and structural strength

Inventive Principle:

Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces the risk of damaging the pattern layer during the protective layer removal process, ensuring the formation of finer patterns required for higher resolution display panels.

Implementation Method 1

removing the protective layer using a laser lift-off process

Methodology Applied

Scientific EffectLaser: Laser

Data Source

PatentUS20260009119A1Method for manufacturing mask

Publication Date: 2026.01.08 SAMSUNG DISPLAY CO LTD

AI summary

A method for manufacturing a mask according to an embodiment includes providing a base layer, forming a pattern layer having a first pattern on the base layer, forming a protective layer on the pattern layer, forming a second pattern on the base layer, and removing the protective layer. The protective layer includes a low-k material.