Mask Protrusions for Display Panel Deposition Accuracy
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Solution Overview
Problem
Current display panel manufacturing processes face challenges in achieving high deposition accuracy and process yield due to issues with mask design, leading to defects in the deposition of layers such as organic light-emitting diodes, where the mask's geometry and protrusions affect the uniformity and effectiveness of the deposition process.
Innovation Solution
A mask design featuring a base sheet with strategically placed protrusions and stepped surfaces is introduced, which defines openings to improve deposition accuracy by controlling the gap between the mask and the substrate, minimizing shadow regions and preventing dent defects, thereby enhancing the formation of uniform layers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional mask design without protrusions is used, then the mask structure is simple, but deposition accuracy is poor and dead spaces are created
Solution Approach 1:
The mask base sheet is segmented by adding protrusions that divide the deposition area into controlled regions. These protrusions create distinct zones with different gap distances to the substrate, enabling precise control over deposition patterns and eliminating dead spaces while maintaining manufacturing feasibility.
Solution Approach 2:
The mask design transitions from a flat two-dimensional structure to a three-dimensional structure by adding protrusions with stepped surfaces. This dimensional change allows control over the gap distance between the mask and substrate, thereby improving deposition accuracy and uniformity without excessive complexity.
2Manufacturing precision
If protrusions are added to improve deposition accuracy, then deposition uniformity improves, but mask manufacturing complexity increases
Solution Approach 1:
Protrusions are strategically positioned at specific locations on the mask base sheet where they are most needed to control deposition patterns. The stepped surfaces of these protrusions create localized gap variations that improve deposition uniformity in critical areas while leaving other regions unchanged, thus balancing manufacturing simplicity with deposition precision.
3Manufacturing precision
If the gap between mask and substrate is reduced for better deposition control, then deposition accuracy improves, but shadow regions increase
Solution Approach 1:
By introducing protrusions with stepped surfaces, the mask creates controlled three-dimensional gap variations. The stepped surfaces are designed with specific dimensions that allow close proximity to the substrate for precise deposition control while geometrically configuring the steps to minimize shadow region formation, thus resolving the contradiction between deposition control accuracy and shadow region minimization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed mask design improves deposition accuracy and reduces dead spaces in the display panel, leading to higher process yield and better uniformity of the deposited layers, thus enhancing the overall quality of the display panel.
Implementation Method 1
a deposition pattern formed by using a mask having an opening defined in a predetermined or selected region thereof
Data Source
AI summary
A mask including a base sheet and at least one protrusion. The base sheet includes a first surface on which a target substrate is seated, a second surface that faces the first surface, and an inside surface portion that defines an opening formed through the first surface and the second surface. The at least one protrusion extends from a selected inside surface of the inside surface toward the opening, in a first region of the base sheet. The at least one protrusion includes a stepped surface. A gap between the stepped surface and the target substrate is greater than a gap between the first surface and the target substrate. The at least one protrusion is not provided extending from a non-selected inside surface of the inside surface portion in a second region of the base sheet.