Mask Sheet Grooves for OLED Deposition Alignment
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Solution Overview
Problem
The existing mask sheets used in thin film deposition for OLED display panels suffer from poor film layer deposition effects due to deformations caused by recessed portions during the stretching process, leading to offset film layers and wide shadows, which affect the accuracy and quality of the deposited films.
Innovation Solution
A mask sheet design with strategically placed grooves on the second side face to balance the pulling force and prevent deformation of the first side face, ensuring that the film layer deposition is accurate and uniform by maintaining the parallel alignment of the mask sheet's sides.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If recessed portions are formed on the mask sheet to define opening portions, then the mask sheet can be used for film layer deposition, but the recessed portions cause deformation during stretching leading to poor film layer deposition effects
Solution Approach 1:
The mask sheet is segmented into multiple opening portions that are distributed at intervals, with each opening portion having isolation strips between them. This segmentation allows the mask sheet to maintain structural integrity while enabling precise film layer deposition in specific regions, resolving the contradiction between ease of manufacture and deposition precision.
Solution Approach 2:
The mask sheet has different structural properties in different regions: the first side face maintains a substantially planar structure for precise deposition, while the second side face has grooves for stress relief. This local differentiation allows the mask sheet to achieve both ease of manufacture and high deposition precision simultaneously.
2Ease of operation
If the mask sheet is stretched to fit the substrate, then the mask sheet can be properly positioned for deposition, but the stretching causes deformation and offset of the film layer
Solution Approach 1:
The grooves are formed on the second side face before the stretching process. This preliminary action prepares the mask sheet to accommodate stretching without deforming the first side face, ensuring that the film layer remains properly aligned during the subsequent stretching and deposition operations.
Solution Approach 2:
The mask sheet undergoes controlled stretching to change its physical dimensions and fit the substrate. The grooves on the second side face enable this parameter change (size and shape) without affecting the planarity of the first side face, thus maintaining film layer alignment precision during the parameter transformation.
3Manufacturing precision
If grooves are added to the second side face to prevent deformation, then the mask sheet maintains parallel alignment, but the structure becomes more complex
Solution Approach 1:
The grooves are located on the second side face of the mask sheet, which is a different dimension from the first side face where the opening portions are formed. This dimensional separation allows the grooves to perform stress relief functions without interfering with the deposition precision of the first side face, resolving the contradiction between alignment precision and structural complexity.
Data Source
AI summary
A mask sheet has a first side face and a second side face that are substantially parallel to each other and arranged oppositely. The first side face is perpendicular to a thickness direction of the mask sheet. The mask sheet includes: at least one opening portion, each opening portion including a first opening extending from the first side face toward the second side face and a second opening extending from the second side face toward the first side face, and the first opening and the second opening are communicated with each other, and an inner border of the second opening being located within an outer border of the first opening in a direction perpendicular to a circumferential direction of the second opening; at least one groove located on a periphery of the second opening, the at least one groove being formed in the second side face of the mask sheet.