Mask Assembly Shield Member Dummy Openings Deformation
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Solution Overview
Problem
Existing mask assemblies for thin film deposition are prone to deformation during the manufacturing process of display devices, leading to defects such as incomplete component formation in cells, which reduces the reliability of the display device.
Innovation Solution
A mask assembly with a shield member positioned between the frame and the open mask, featuring dummy openings that are strategically sized and positioned to prevent deformation of the open mask, ensuring that deposition material does not pass through these areas and maintaining the integrity of the mask assembly during the thin film deposition process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the open mask is used to define deposition openings for forming components in cells, then the manufacturing capability is improved, but the mask deformation occurs during the manufacturing process
Solution Approach 1:
The mask assembly is segmented into multiple functional regions: deposition openings for actual component formation and dummy openings for structural support. This segmentation allows the mask to maintain its shape while enabling manufacturing operations, resolving the contradiction between productivity and reliability.
Solution Approach 2:
Dummy openings act as intermediary structures between the frame and deposition openings. These dummy openings provide structural reinforcement to the mask without interfering with the actual deposition process, preventing mask deformation while maintaining manufacturing capability.
2Manufacturing precision
If the open mask is made thinner to improve precision, then the manufacturing precision is improved, but the mask becomes more prone to deformation
Solution Approach 1:
The mask assembly exhibits local quality variations through the strategic placement of dummy openings in specific regions. These dummy openings provide localized structural reinforcement where needed, allowing the mask to maintain both thinness for precision and sufficient stability to prevent deformation during operations.
3Productivity
If the distance between deposition openings is reduced to increase cell density, then the productivity is improved, but the mask deformation risk increases
Solution Approach 1:
The space between deposition openings is segmented by introducing dummy openings. This segmentation creates additional structural support points that prevent mask deformation, allowing deposition openings to be placed closer together while maintaining mask integrity and enabling higher cell density.
Data Source
AI summary
A mask assembly includes: a frame; an open mask disposed on the frame, and defining a first deposition opening, a second deposition opening spaced apart from the first deposition opening in a first direction, and a first dummy opening located between the first deposition opening and the second deposition opening; and a shield member including a first shield part overlapping the first dummy opening in a plan view.