Mask Assembly Shutter for Simultaneous Deposition Testing
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Solution Overview
Problem
Current deposition processes require multiple test substrates to assess the deposition of different materials, increasing testing costs and time due to the need for sequential loading and measurement of each substrate.
Innovation Solution
A mask assembly that uses a single test substrate with a shutter mechanism to position deposition materials from multiple sources on different areas of the substrate, allowing for simultaneous deposition and measurement, reducing the need for multiple substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple test substrates are used to test multiple deposition sources, then each deposition source can be tested separately, but the testing cost and time increase due to sequential loading and measurement
Solution Approach 1:
Multiple test substrates are combined into a single integrated test substrate assembly that can accommodate multiple substrates simultaneously. This allows multiple deposition sources to deposit materials on different substrates at the same time, eliminating sequential processing and reducing testing time while maintaining testing accuracy for each deposition source
Solution Approach 2:
The test substrate assembly is designed with universal functionality to hold and process multiple test substrates simultaneously. This multi-functional design enables a single assembly to serve multiple testing purposes across different deposition sources, reducing the need for separate testing procedures and minimizing overall testing time
2Reliability
If multiple test substrates are used to test multiple deposition sources, then each material deposition can be assessed individually, but the number of substrates and testing complexity increase
Solution Approach 1:
Multiple test substrates are merged into a single integrated assembly structure that provides individual deposition areas for each substrate. This consolidation reduces the number of separate testing systems needed while maintaining the ability to individually assess each material deposition, thereby reducing overall system complexity
Solution Approach 2:
The integrated test substrate assembly is segmented into distinct deposition areas, each corresponding to a specific deposition source. This segmentation allows individual assessment of each material deposition while maintaining a unified structure, simplifying the overall testing system architecture
3Reliability
If multiple test substrates are sequentially loaded and measured, then each deposition can be tested separately, but the testing cost increases
Solution Approach 1:
Multiple test substrates are merged into a single integrated assembly that can be loaded and processed as one unit. This reduces the total number of separate substrate loading operations needed and allows simultaneous testing of multiple deposition sources, thereby reducing the effective quantity of substrates required and associated testing costs
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces testing costs and time by allowing a single test substrate to evaluate multiple deposition sources, enabling efficient assessment of deposition processes.
Implementation Method 1
a shutter member coupled to the base substrate to block the deposition materials from being deposited on a predetermined area of the base substrate in response to movement of the mask assembly
Data Source
AI summary
A deposition apparatus includes deposition sources, a deposition chamber, a mask assembly, and a transfer unit. The mask assembly includes a support member, a shutter member, and a drive member. The support member has a first opening configured to allow the deposition materials to pass through while supporting the base substrate on which the passed-through deposition materials are deposited. The shutter member is accommodated in the support member and has a second opening smaller than the first opening. The drive member is configured to change a position of the second opening with respect to the base substrate in accordance with the movement of the mask assembly.