Mask Process Simulation via Low-to-High Fidelity Conversion
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Solution Overview
Problem
Conventional shape simulation apparatuses face a trade-off between precision and speed, requiring a large number of calculation points to achieve accurate mask process simulations, which slows down the processing speed.
Innovation Solution
A simulation apparatus that utilizes a factor amount converting information storage unit to convert low-fidelity information into high-fidelity information using a larger number of evaluation points, combined with an ADI simulation unit, a converting unit, and an etching simulation unit to perform mask process simulations accurately and efficiently.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a large number of calculation points are used to precisely perform mask process simulation, then manufacturing precision is improved, but productivity deteriorates due to low simulation speed
Solution Approach 1:
The patent pre-calculates and stores correspondence relationships between low-fidelity and high-fidelity information in advance. During actual simulation, the system converts low-fidelity results to high-fidelity results using pre-established conversion rules, avoiding the need to perform computationally intensive high-fidelity calculations in real-time. This preliminary preparation enables fast and accurate mask process simulations.
Solution Approach 2:
The patent introduces low-fidelity information as an intermediary that bridges the gap between fast but inaccurate conventional simulation and slow but accurate high-fidelity simulation. The conversion unit acts as a mediator that transforms low-fidelity results into high-fidelity results using pre-stored correspondence data, achieving both speed and precision.
2Measurement precision
If the number of evaluation points is increased to acquire high-fidelity information, then measurement precision is improved, but loss of time increases due to longer calculation duration
Solution Approach 1:
The system pre-computes and stores the correspondence between low-fidelity and high-fidelity information across various conditions. When a simulation is needed, it quickly retrieves and applies the appropriate conversion relationship rather than performing time-consuming high-fidelity calculations, thus obtaining high-precision results without the time penalty.
Solution Approach 2:
The patent creates a copy or approximation model (low-fidelity information) that can be quickly computed, then uses pre-established conversion rules to transform this copy into high-fidelity results. This copying approach allows rapid simulation while maintaining measurement precision through the conversion process.
Data Source
AI summary
A simulation apparatus includes: a factor amount converting information storage unit in which factor amount converting information, which is information indicating correspondence between low-fidelity information and high-fidelity information, is stored; a writing pattern information storage unit in which writing pattern information is stored; an ADI simulation unit that performs an ADI simulation using one or more evaluation points, for a writing pattern indicated by the writing pattern information, thereby acquiring one or more factor amounts; a converting unit that acquires high-fidelity information, which is one or more factor amounts, corresponding to the low-fidelity information, which is one or more factor amounts, using the factor amount converting information; and an etching simulation unit that performs an etching simulation using the one or more factor amounts acquired by the converting unit.