Segmented Mask Stage Layout for Adhesion and Alignment
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Solution Overview
Problem
Existing vacuum deposition methods for organic light emitting display devices face challenges in achieving a tight adhesion between the mask assembly and the mask stage, and aligning the pattern openings of the mask assembly accurately on the deposition area of the substrate.
Innovation Solution
The mask stage is designed with a configuration of moving modules and attachment modules spaced apart in specific directions, allowing for improved adhesion and alignment of the mask assembly on the substrate, utilizing a zero-electromagnet attachment mechanism for secure attachment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the mask assembly is tightly adhered to the substrate using conventional vacuum deposition methods, then the adhesion between mask and substrate is achieved, but the alignment precision of pattern openings on the deposition area deteriorates
Solution Approach 1:
The mask stage is divided into multiple independent modules: a stage frame, multiple moving modules (first, second, third moving modules), and multiple attachment modules (first, second, third attachment modules). Each module can be independently controlled to move and attach, allowing the mask assembly to be securely fastened while maintaining alignment precision through coordinated movement of segmented components.
2Reliability
If the mask assembly is secured with multiple attachment points, then the adhesion and stability are improved, but the device complexity increases
Solution Approach 1:
Each moving module serves multiple functions: it moves the mask assembly to precise positions and also works in coordination with attachment modules to secure the mask. The attachment modules similarly provide both attachment functionality and contribute to the overall stability and positioning of the mask assembly, reducing the need for separate dedicated components for each function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the tight adhesion and precise alignment of the mask assembly, ensuring accurate deposition patterns on the substrate, thereby improving the manufacturing process of organic light emitting display devices.
Implementation Method 1
utilizing a zero-electromagnet attachment mechanism for secure attachment
Data Source
AI summary
A mask stage includes a stage frame supporting a mask frame, a plurality of moving modules disposed on the stage frame to overlap the mask frame, and a plurality of attachment modules disposed on the stage frame to overlap the mask frame, wherein the plurality of moving modules and the plurality of attachment modules are spaced apart from each other, wherein at least one attachment module is disposed between the plurality of moving modules.