Mask Stage Module Layout for Precise Alignment and Magnetic Adhesion
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Solution Overview
Problem
The challenge in organic light emitting display devices is achieving a tight adhesion between the mask assembly and the mask stage, and aligning the pattern openings of the mask assembly accurately on the deposition area of the substrate during the vacuum deposition process.
Innovation Solution
A mask stage design featuring a stage frame with spaced moving and attachment modules that support the mask frame, allowing for precise alignment and secure attachment of the mask assembly, utilizing moving modules for upward movement and attachment modules that engage magnetically to enhance adhesion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple moving modules are used to support the mask frame, then the mask assembly can be moved upward for alignment, but the adhesion between mask assembly and mask stage may be insufficient
Solution Approach 1:
The mask stage is segmented into multiple independent modules: moving modules (first and second) for vertical adjustment and attachment modules (third and fourth) for securing the mask frame. This segmentation allows the mask frame to be both movable for alignment and securely attached when positioned, resolving the contradiction between movement capability and adhesion strength.
Solution Approach 2:
The system transitions from a static support structure to a dynamic one where the mask frame can be moved vertically by the moving modules during alignment, then secured by the attachment modules during deposition. This dynamic capability allows the system to adapt between movement and fixation states, satisfying both alignment precision and adhesion requirements.
2Reliability
If the mask assembly is securely attached to the mask stage, then adhesion is improved, but alignment accuracy may be compromised
Solution Approach 1:
The moving modules enable preliminary vertical movement of the mask frame to achieve accurate alignment of pattern openings with deposition areas before the attachment modules engage. This preliminary alignment action ensures manufacturing precision is achieved before secure attachment, eliminating the trade-off between adhesion and alignment accuracy.
3Reliability
If attachment modules are disposed between moving modules, then adhesion is enhanced, but device complexity increases
Solution Approach 1:
Each module (moving and attachment) is designed with standardized interfaces and functions that can be replicated and combined. The moving modules provide vertical movement while the attachment modules provide securing functionality, and their alternating arrangement allows both functions to be achieved with a relatively simple modular structure, reducing the impact of complexity while enhancing adhesion.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design ensures a tight adhesion and accurate alignment of the mask assembly on the substrate, improving the deposition process efficiency and quality in organic light emitting display devices.
Implementation Method 1
attachment modules that engage magnetically to enhance adhesion
Data Source
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AI summary
A mask stage includes a stage frame supporting a mask frame, a plurality of moving modules disposed on the stage frame to overlap the mask frame, and a plurality of attachment modules disposed on the stage frame to overlap the mask frame, wherein the plurality of moving modules and the plurality of attachment modules are spaced apart from each other, wherein at least one attachment module is disposed between the plurality of moving modules.