Mask Stage Segmentation for Flatness Control
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Solution Overview
Problem
Existing mask stages with a single plate design face challenges in maintaining uniform flatness, especially as the size of the mask assembly increases, leading to inconsistencies in the support and alignment of the mask frame, which can result in uneven deposition of materials during the manufacturing of display devices.
Innovation Solution
A mask stage comprising separate plates connected by detachable connection portions with adjustable height, allowing for the insertion of shims and air holes to optimize the flatness and reduce frictional forces, enabling precise adjustment and alignment of the mask frame.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single plate design is used for the mask stage, then the structure is simple, but the flatness uniformity deteriorates as the mask assembly size increases
Solution Approach 1:
The mask stage is divided into multiple separate plates (first plate, second plate, third plate, fourth plate) arranged in a closed loop configuration. Each plate can be independently manufactured and adjusted, allowing for better control of flatness uniformity across large mask assemblies while maintaining manageable structural complexity through modular design.
2Ease of manufacture
If the mask stage is made as a single integrated plate, then manufacturing is easier, but adjustment of flatness becomes difficult
Solution Approach 1:
The mask stage incorporates adjustable connection portions between plates that allow dynamic adjustment of flatness. Heights of connection portions can be different at each point, and shims can be inserted to adjust the relative positions of plates, enabling flatness optimization after assembly while keeping the manufacturing process relatively simple.
3Stability of the object's composition
If plates are connected with fixed connection portions, then the structure is stable, but flatness adjustment becomes impossible
Solution Approach 1:
Connection portions are designed with adjustable heights rather than fixed positions. The mask stage allows insertion of shims at connection portions to adjust the relative heights of adjacent plates, enabling flatness control while maintaining structural stability through the closed loop plate configuration.
4Device complexity
If the mask stage uses a single plate design, then the number of components is reduced, but frictional forces increase causing sagging
Solution Approach 1:
The mask stage is segmented into multiple plates connected by connection portions, which distributes the mask frame weight across multiple support points. This segmentation reduces frictional forces at each contact point and prevents sagging by providing better weight distribution, while the modular design keeps the overall component count manageable.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution allows for easy adjustment of the mask stage to ensure uniform flatness, preventing sagging and ensuring that the mask sheet is seated flatly and at the same height across the mask frame, improving the manufacturing process by maintaining consistent deposition patterns.
Implementation Method 1
the connection portion may include an air hole that passes through the inside of the connection portion and injects air in a direction opposite to a direction in which the mask frame is supported
Data Source
AI summary
A mask stage includes plates disposed adjacent to each other, the plates forming a closed loop in a plan view, and a connection portion connecting adjacent ones among the plates to each other, the connection portion being detachable from the plates. The mask stage supports a mask frame.