Mask Assembly Sub-Support Segmentation for Deformation Control
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Solution Overview
Problem
Traditional vapor-deposition masks, especially those with Fine Metal Masks (FMM), face challenges in precision due to deformation of support sheets during assembly, leading to imprecise pattern formation on substrates, as the thick support sheets can warp and affect the accuracy of both working and dummy areas.
Innovation Solution
A mask assembly with a frame and a mask supported by first and second sub-support sheets, where the second sub-support sheets are thinner than the first, reducing deformation and enhancing precision, and an assistant member with alignment patterns ensures accurate positioning and shielding, preventing drooping and improving precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If thick support sheets are used to support the mask, then the mask assembly has sufficient structural strength, but the support sheets deform during assembly causing imprecise pattern formation
Solution Approach 1:
The support sheet is divided into multiple thinner sub-support sheets (first sub-support sheets and second sub-support sheets) that are stacked together. This segmentation maintains the required structural strength through the stacked configuration while each individual thin sheet resists deformation better than a single thick sheet, thereby improving pattern formation precision.
Solution Approach 2:
Multiple sub-support sheets are stacked to form a composite support structure. This composite configuration provides the necessary mechanical strength equivalent to a thick sheet while the distributed thin-layer structure reduces internal stresses and deformation during assembly, resolving the contradiction between strength and precision.
2Stability of the object's composition
If thick support sheets are used to support the mask, then the mask assembly has sufficient structural stability, but the support sheets warp affecting accuracy of working and dummy areas
Solution Approach 1:
The support sheet is segmented into multiple thin sub-support sheets stacked together. This segmentation maintains structural stability through the stacked configuration while minimizing warping of individual sheets, thereby preserving the accuracy of both working and dummy areas on the substrate.
Solution Approach 2:
The thickness parameter of the support sheets is changed from a single thick sheet to multiple thin sheets stacked together. This parameter change maintains the overall structural stability while reducing the warping tendency of individual sheets, thus improving the accuracy of pattern formation in both working and dummy areas.
3Manufacturing precision
If thin sub-support sheets are used to reduce deformation, then pattern formation precision is improved, but the support structure may have insufficient strength
Solution Approach 1:
Multiple thin sub-support sheets are merged by stacking them together to form a composite support structure. This merging maintains the low deformation characteristics of thin sheets while the combined structure provides sufficient structural strength, thus resolving the contradiction between precision and strength.
Solution Approach 2:
The stacked thin sub-support sheets form a composite support structure that combines the advantages of thin sheets (low deformation) with the strength of a multi-layer configuration. This composite structure achieves both high pattern formation precision and adequate structural strength.
Data Source
AI summary
Disclosed are a mask assembly, and a method for assembling the same. The mask assembly includes: a frame including a hollow area; a mask arranged across the hollow area, wherein two opposite ends of the mask are fixed on the frame; and first support sheets configured to support the mask, wherein the first support sheets include first sub-support sheets and second sub-support sheets stacked over each other, the first sub-support sheets and the second sub-support sheets are arranged across the hollow area of the frame, and two opposite ends of each of the first sub-support sheets, and two opposite ends of each of the second sub-support sheets are fixed on the frame; wherein orthographic projections of the first sub-support sheets onto the second sub-support sheets lie into the second sub-support sheets; and the thickness of the second sub-support sheets is smaller than the thickness of the first sub-support sheets.