Mask-Support Assembly for OLED Pixel Deposition
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Solution Overview
Problem
In ultra-high-resolution OLED manufacturing processes, masks often sag or twist due to their large area and thinness, leading to alignment issues and potential pixel deposition failures.
Innovation Solution
A mask-support assembly is developed, featuring a support with an edge portion and a grid portion, and a mask with cell portions and separation portions, where at least part of the mask is disposed in a trench portion recessed in the support, enhancing alignment and stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a large-area thin mask is used for OLED pixel deposition, then the mask coverage area is increased, but the mask sags or twists under load causing alignment failure
Solution Approach 1:
The mask support structure is segmented into multiple rigid sub-frames arranged in a grid pattern, rather than using a single large continuous support. This segmentation allows each sub-frame to maintain flatness independently while collectively supporting a large-area mask, preventing sagging and twisting that would occur with a single continuous support structure.
Solution Approach 2:
The support structure transitions from a two-dimensional planar support to a three-dimensional grid framework with vertical rigidity. By adding the dimensional complexity of a grid structure with intersecting support beams, the system gains enhanced mechanical stability and load distribution capability, preventing mask deformation while maintaining large area coverage.
2Manufacturing precision
If a thin mask film is used for fine metal mask method, then the mask precision is improved, but the mask deformation under load increases
Solution Approach 1:
A specially designed rigid support frame acts as an intermediary between the thin precision mask and the deposition process. This intermediate structure provides the mechanical strength and stability needed to prevent mask deformation, while allowing the thin mask film to maintain its high precision pattern definition during the deposition process.
Solution Approach 2:
The mask assembly becomes a composite structure combining the thin precision mask film with a rigid support frame. This composite construction allows the system to exhibit both the high precision of the thin mask film and the mechanical strength of the rigid frame, preventing sagging and twisting while maintaining pattern accuracy.
3Reliability
If mask welding and fixing process is applied, then the mask is secured to the frame, but the alignment precision deteriorates due to mask deformation
Solution Approach 1:
The mask is pre-aligned and fixed to the rigid support frame before the deposition process begins. The rigid frame structure ensures that once the mask is positioned, it maintains its alignment without deformation during subsequent handling and deposition, preventing alignment drift that would occur with flexible mask support structures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables clear alignment of the mask, preventing sagging or twisting, and ensures stable pixel deposition, achieving ultra-high resolution pixels suitable for microdisplays in virtual reality devices.
Implementation Method 1
at least a part of the mask is disposed in a trench portion recessed in the support
Implementation Method 2
a connection portion including Ni and Si or a connection portion including Fe, Ni, and Si may be interposed between the support and the mask
Data Source
AI summary
The present invention relates to a mask-support assembly and a producing method thereof. The mask-support assembly according to the present invention is used in a process of forming organic light emitting diode (OLED) pixels on a semiconductor wafer, and may include a support including an edge portion and a grid portion; and a mask connected onto the support and including a plurality of cell portions with mask patterns formed therein, wherein at least a part of the mask is disposed in a trench portion recessed in the support.