Mask Manufacturing Template Distortion Correction
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Solution Overview
Problem
Existing mask manufacturing methods fail to accurately transfer design patterns from templates with non-flat or distorted surfaces to polymer layers due to the inability to selectively correct distortions without affecting adjacent regions, leading to inaccuracies in the mask pattern formation.
Innovation Solution
A method and apparatus that divide the template's upper surface into regions, using piezo actuators to correct distorted areas independently along horizontal and vertical axes, followed by pressing the template onto a polymer layer and curing the mask pattern with ultraviolet light to ensure precise pattern transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a template with non-flat or distorted surface is used to transfer design patterns, then the template can be used for mask manufacturing, but the pattern transfer accuracy deteriorates due to inability to selectively correct distortions
Solution Approach 1:
The template surface is divided into multiple regions, with each region independently controllable via separate piezo actuators. This segmentation allows selective correction of distorted regions without affecting adjacent non-distorted regions, thereby maintaining both template usability and pattern transfer accuracy.
Solution Approach 2:
Different regions of the template are treated differently based on their distortion characteristics. Piezo actuators are selectively activated only for regions requiring correction, applying local quality adjustments rather than uniform treatment across the entire template surface.
2Manufacturing precision
If the entire template surface is corrected using piezo actuators, then distortion correction is achieved, but adjacent non-distorted regions are also affected
Solution Approach 1:
The template is segmented into multiple independently controllable regions. By activating only the piezo actuators corresponding to distorted regions, the system achieves distortion correction while preserving the integrity of adjacent non-distorted regions.
Solution Approach 2:
The correction mechanism applies localized adjustments only where needed. Each region's piezo actuators are controlled independently based on the specific distortion characteristics of that region, ensuring that non-distorted regions remain unaffected.
3Device complexity
If conventional pressing method is used without distortion correction, then the process is simple, but the mask pattern accuracy deteriorates
Solution Approach 1:
Distortion correction is performed as a preliminary step before the pressing operation. By pre-correcting the template surface using piezo actuators, the system ensures high mask pattern accuracy during the subsequent pressing process without significantly increasing overall process complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for accurate correction of distortions in the template, enabling precise engraving of the design pattern onto the polymer layer, resulting in a mask with the desired pattern and improved manufacturing accuracy.
Implementation Method 1
The deforming of the distorted region may include moving the distorted region in two horizontal axes substantially perpendicular to each other using the piezo actuator. The deforming of the distorted region may further include moving the distorted region in a vertical axis using the piezo actuator.
Implementation Method 2
The curing of the mask pattern may include irradiating an ultraviolet light to the mask pattern. The irradiating of the ultraviolet light may include irradiating the ultraviolet light to a side surface of the mask pattern.
Data Source
AI summary
A method of manufacturing a mask includes dividing an upper surface of a template having a design pattern into a plurality of regions, the template being arranged over a polymer layer on a mask substrate, correcting a distorted region among the regions, pressing the polymer layer with the template to form a mask pattern corresponding to the design pattern on the polymer layer; and curing the mask pattern.