Vapor Deposition Mask Tensioning for Stronger Frame Welding

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Solution Overview

Problem

The challenge in manufacturing vapor deposition mask devices is the generation of flexure or a wavy shape in thin vapor deposition masks when supported, leading to reduced adhesion and weld strength between the mask and the frame, especially at areas of non-close contact, which affects the precision and reliability of organic EL display production.

Innovation Solution

A method involving the use of a manufacturing apparatus that clamps the extension sections of the vapor deposition mask to apply tension and ensure close contact between the mask and the frame, utilizing laser welding to enhance the weld strength by positioning the mask such that the second surface is in close contact with the frame's front surface and extending towards the back surface, preventing flexure and improving adhesion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a vapor deposition mask device with small opening portions is used for producing fine pitch patterns, then manufacturing precision is improved, but the strength of the mask device deteriorates due to stress concentration

Engineering Contradiction:
Improvefine pitch pattern precisionVSAvoidmask device strength
Core Design Contradiction:
Manufacturing precisionVSStrength

Solution Approach 1:

The patent applies local quality by making the thickness of the mask device non-uniform: the first region (with opening portions) has a first thickness while the second region (without opening portions) has a second thickness greater than the first. This local variation in thickness provides reinforcement at critical areas without compromising the fine pitch pattern formation capability in the opening regions.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The mask device is segmented into two distinct regions: a first region containing opening portions for pattern formation and a second region without opening portions that serves as a reinforcement area. This segmentation allows each region to serve its specific function - the first region for precision patterning and the second region for structural strength.

Inventive Principle:
Principle #1Segmentation

2Strength

If the thickness of the mask device is increased to improve strength, then mask device strength is improved, but manufacturing precision deteriorates due to increased stress during vapor deposition

Engineering Contradiction:
Improvemask device strengthVSAvoidpattern formation precision
Core Design Contradiction:
StrengthVSManufacturing precision

Solution Approach 1:

Instead of uniformly increasing thickness throughout the mask device, the patent applies local quality by restricting increased thickness to the second region (reinforcement region) only. The first region (with opening portions) maintains its original thickness to minimize stress concentration and ensure precise pattern formation during vapor deposition.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The mask device is divided into functional segments where the second region serves specifically as a stress-bearing reinforcement area with greater thickness, while the first region maintains optimal thickness for precision vapor deposition patterning. This segmentation resolves the contradiction by localizing the thickness increase to where it is structurally necessary.

Inventive Principle:
Principle #1Segmentation

3Strength

If a support structure is added to improve mask device strength, then mask device strength is improved, but device complexity increases

Engineering Contradiction:
Improvemask device strengthVSAvoidmask device structure complexity
Core Design Contradiction:
StrengthVSDevice complexity

Solution Approach 1:

The patent merges the support function with the existing mask device body by forming an integrated second region with greater thickness. Rather than adding a separate support structure, the reinforcement is built into the mask device itself, combining structural support and pattern formation functions into a single unified component.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The second region with greater thickness serves multiple functions: it provides structural reinforcement to prevent breakage, acts as a stress relief area during vapor deposition, and maintains overall device integrity. This multi-functionality eliminates the need for separate support structures, reducing device complexity while improving strength.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively restrains flexure and wavy shapes in the vapor deposition mask, enhancing the weld strength and ensuring precise, reliable deposition of materials on organic EL substrates, thereby improving the accuracy and durability of the organic EL display devices.

Implementation Method 1

a vapor deposition device 200 to deposit a vapor phase material on a substrate 10

Methodology Applied
Scientific EffectVapor deposition: Physical Vapour Deposition

Data Source

PatentEP3680362B1Manufacturing method for a vapor deposition mask device
Publication Date: 2024.01.10 DAI NIPPON PRINTING CO LTD
  • EP3680362B1 patent drawingFigure 1A~1B
  • EP3680362B1 patent drawingFigure 2
  • EP3680362B1 patent drawingFigure 3

AI summary

A method of manufacturing a vapor deposition mask device includes: a preparing step of preparing a vapor deposition mask that includes a plurality of through-holes extending from a first surface to a second surface; and a welding step of welding the vapor deposition mask to a front surface of a frame that includes the front surface and a back surface opposite to the front surface.