Thin Film Mask Assembly Wrinkle Suppression via End Tension
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Solution Overview
Problem
In the division mask method for thin film deposition, unit masks experience wrinkles due to tension forces, leading to deposition defects as the wrinkles expand towards the center of the mask, affecting the quality of the thin film.
Innovation Solution
A mask assembly with end tension units that apply tension in a direction perpendicular to the unit mask's length, using a frame with concave grooves and moving members to control and remove wrinkles, ensuring the ends of the unit masks are fixed and tensioned in a way that minimizes deformation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If unit masks are extended in the length direction by applying tension force, then the masks can be fixed to the frame, but wrinkles are generated in the width direction
Solution Approach 1:
The invention applies preliminary anti-action by introducing end tension units that apply tension in the width direction before deposition to counteract the wrinkles caused by length direction tension. The end tension units are positioned to apply force at the ends of the mask, creating a counterbalancing effect that prevents wrinkle formation during the deposition process.
Solution Approach 2:
The invention implements dynamics by making the end tension units movable along the guide rails. The moving members can be positioned at different locations and adjusted to apply appropriate tension forces dynamically. This allows the system to adapt to different mask sizes and wrinkle conditions, providing flexible control over the mask tension state during deposition.
2Area of moving object
If the width of the unit mask is increased, then more area is covered, but wrinkles become more serious
Solution Approach 1:
The invention addresses the wrinkle problem in the width direction by introducing a new dimension of control through end tension units that apply force specifically at the mask ends. This dimensional approach to force application allows independent control of tension in the width direction, enabling larger mask areas to be maintained wrinkle-free by targeting the root cause at the mask boundaries.
3Ease of operation
If both ends of the unit mask are fixed to a clamp, then the mask is extended, but wrinkles are generated at the ends that expand to the center
Solution Approach 1:
The invention segments the mask system by introducing separate end tension units that independently control the tension at each end of the mask. This segmentation allows precise control of end tensions without affecting the overall mask extension, preventing wrinkle formation at the ends while maintaining the extended configuration needed for operation.
Solution Approach 2:
The end tension units act as intermediary devices between the mask and the frame structure. These units provide a controlled interface that applies tension forces through guide rails and moving members, mediating the force transmission to prevent direct clamping-induced wrinkles while maintaining necessary mask tension for proper positioning.
Data Source
AI summary
A mask assembly for a thin film deposition includes: a frame main body forming an opening; a plurality of unit masks having both ends fixed to the frame main body in a state that a tension force is applied in a first direction; and an end tension unit installed to the frame main body. The end tension unit moves according to a second direction crossing the first direction between two neighboring unit masks among a plurality of unit masks for tensioning of the unit mask in the second direction.