Masked Multi-Spot Laser Transfer for Accurate Micro LED Processing
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Solution Overview
Problem
Current laser transfer technologies for micro LEDs face challenges with space or time energy usage efficiency, and high repetition rate lasers can suffer from temporal jitter due to synchronization issues, leading to spatial accuracy problems.
Innovation Solution
A laser processing equipment and method that utilizes a pulsed laser light source, a vibration mirror, a mask with openings, and a focusing module to create focused laser spots, allowing for precise and efficient transfer of micro LEDs with improved accuracy and energy usage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If high energy laser or high pulse-repetition-rate laser is used for micro LED transfer, then the processing speed and production capacity can be improved, but the energy usage efficiency deteriorates due to space or time energy waste
Solution Approach 1:
The patent segments the laser beam into multiple independent laser spots arranged in an array, allowing simultaneous processing of multiple micro LEDs. The mask with multiple openings divides the single laser beam into multiple focused spots, enabling parallel processing that improves productivity while maintaining energy efficiency by concentrating energy only where needed.
Solution Approach 2:
The patent combines multiple laser spots into a single laser beam array that processes multiple micro LEDs simultaneously. By merging the processing function into a single beam structure that creates multiple spots, the system achieves parallel processing without requiring multiple separate laser sources, thus improving energy usage efficiency while maintaining high production capacity.
2Productivity
If high repetition rate laser is used to improve processing speed, then the production capacity can be increased, but the spatial accuracy deteriorates due to temporal jitter from synchronization issues
Solution Approach 1:
The patent uses pulsed laser operation with controlled pulse repetition rates that are synchronized with the scanning system. By employing periodic pulsed action rather than continuous high-repetition-rate operation, the system maintains temporal synchronization, eliminates jitter, and preserves spatial accuracy while still achieving high processing speeds through optimized pulse timing.
3Adaptability or versatility
If conventional laser transfer technology is used for micro LEDs with side length less than 100 microns, then the processing can be performed, but the energy usage efficiency deteriorates due to difficulty in concentrating energy on small targets
Solution Approach 1:
The patent replaces conventional mechanical focusing methods with optical field control through a mask and focusing module. This substitution enables precise concentration of laser energy at the focal plane, creating small, intense laser spots that efficiently process micro LEDs with side lengths less than 100 microns while maintaining high energy usage efficiency through optimized optical field distribution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves high accuracy, high energy usage efficiency, and high production capacity by precisely focusing pulsed laser beams onto micro LEDs, addressing the inefficiencies and accuracy issues of existing technologies.
Implementation Method 1
a pulsed laser light source is used to provide a pulsed laser beam
Implementation Method 2
a vibration mirror is used to turn the pulsed laser beam
Implementation Method 3
a focusing module is used to respectively focus the pulsed laser beam passing through the openings into multiple laser spots
Data Source
AI summary
A laser processing equipment includes a laser unit and a carrier. The laser unit includes a pulsed laser light source, a vibration mirror, a mask, and a focusing module. The pulsed laser light source provides a pulsed laser beam. The vibration mirror turns the pulsed laser beam. The mask receives the pulsed laser beam. The mask has multiple openings distributed along a first direction. The openings are used to allow the pulsed laser beam to pass through. The focusing module respectively focuses the pulsed laser beam passing through the openings into multiple laser spots distributed along the first direction. The carrier carries multiple processing elements. The processing elements are disposed corresponding to distribution positions of the laser spots along the first direction. A laser processing method is also provided.