Masked Plasma Source for Coating Deep Hollow Interiors

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing methods for coating internal surfaces of hollow articles, such as pipes and tubes, face challenges including health and environmental risks, high process temperatures, and line-of-sight limitations, making them unsuitable for industrial applications.

Innovation Solution

A plasma source with a cathode and target is used to deliver plasma inside hollow articles, accompanied by a masking to control plasma formation, and a vacuum chamber with a gas supply and magnetic field to direct the plasma flux, allowing for controlled deposition within cavities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional PVD techniques are used, then coating can be deposited on surfaces, but the process is line-of-sight-based and cannot deposit coatings inside cavities having significant depth

Engineering Contradiction:
Improvecoating deposition capabilityVSAvoidability to coat cavity interiors
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The plasma source is divided into separate functional components: a cathode assembly that can be positioned and moved independently, and a stationary target. This segmentation allows the plasma generation zone to be strategically placed at the cavity entrance and moved along the cavity length, enabling coating deposition deep inside cavities that were previously inaccessible to line-of-sight methods.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A plasma field is introduced as an intermediary medium to transport coating material from the target to the cavity interior surfaces. The plasma acts as a carrier that can navigate complex cavity geometries, enabling deposition on surfaces that are not directly line-of-sight accessible from the target, thus overcoming the fundamental limitation of conventional PVD techniques.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Strength

If chromium-based coatings are used to enhance surface properties, then wear and corrosion resistance is improved, but significant health and environmental risks arise from carcinogenic Cr (VI) compounds

Engineering Contradiction:
Improvewear and corrosion resistanceVSAvoidhealth and environmental risks
Core Design Contradiction:
StrengthVSObject-affected harmful factors

Solution Approach 1:

The invention changes the material parameter of the coating from toxic chromium-based materials to non-toxic alternatives such as aluminum, titanium, or their nitrides and oxides. This parameter change maintains the protective function (wear and corrosion resistance) while eliminating the harmful chemical properties of Cr(VI) compounds, thus resolving the contradiction between performance and safety.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention converts the harmful aspect of conventional coating materials into a benefit by selecting materials that are inherently non-toxic and environmentally friendly. The coating process itself, using plasma, converts gaseous precursors into solid protective layers without requiring toxic chemicals, thus turning a potential harm (chemical exposure) into a benefit (safe, clean process).

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

3Manufacturing precision

If CVD technique is used to produce coatings on internal surfaces, then coating can be formed, but high process temperatures are required which are not suitable for many component materials

Engineering Contradiction:
Improvecoating formation capabilityVSAvoidprocess temperature
Core Design Contradiction:
Manufacturing precisionVSTemperature

Solution Approach 1:

The invention replaces the thermal field (heat) used in CVD with a plasma field. Instead of using high temperatures to activate chemical reactions and deposit coatings, the process uses plasma-generated reactive species and ion bombardment to achieve coating deposition at lower temperatures, making the process suitable for temperature-sensitive component materials.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention changes the fundamental process parameter from temperature-driven (CVD) to plasma-driven. By using plasma to provide the necessary activation energy and reactive species for coating deposition, the process can proceed at significantly lower temperatures than conventional CVD, thus resolving the contradiction between coating formation capability and temperature requirements.

Inventive Principle:
Principle #35Parameter changes

4Manufacturing precision

If masking is applied to control plasma formation, then unwanted parasitic discharges are eliminated and material deposition is well-defined, but device complexity increases

Engineering Contradiction:
Improvespatial control of depositionVSAvoidapparatus structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The masking is applied selectively only where needed - at the cathode and target regions - to control plasma formation locally. This localized approach to masking provides precise spatial control of deposition without requiring complete masking of the entire apparatus, thus achieving well-defined material deposition while minimizing the increase in device complexity.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables efficient, controlled, and spatially defined coating or surface modification within hollow articles, overcoming health risks and line-of-sight limitations while maintaining process control and versatility.

Implementation Method 1

the target is a thermionic electron emission source

Methodology Applied
Scientific EffectThermionic emission: Thermionic Emission

Implementation Method 2

Physical Vapor Deposition processes can be realized in several different techniques which include sputtering, cathodic arc evaporation, thermal evaporation, or electron beam evaporation

Methodology Applied
Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Implementation Method 3

a vacuum chamber with a gas supply and magnetic field to direct the plasma flux

Methodology Applied
Scientific EffectMagnetic field: Magnetic Field

Data Source

PatentUS12503756B2Apparatus and method for coating the inner surface of a hollow article
Publication Date: 2025.12.23 PLASMATERIA GMBH
  • US12503756B2 patent drawing
  • US12503756B2 patent drawing

AI summary

The invention relates to an apparatus for forming a coating on and/or modifying the properties of the inner surface of a hollow article (1), wherein the apparatus comprises a plasma source (2), the plasma source (2) having an elongate shape and comprising a cathode (3) as well as a target (4), wherein the target (4) is a thermionic electron emission source, wherein the target (4) is connected to the cathode (3) in an electrically conductive manner, wherein the plasma source (2) further comprises a masking (5) which partially covers the outer surface of the cathode (3) and the target (4), and which masking (5) is adapted to prevent the formation of plasma on an area covered by the masking (5) during operation of the apparatus, wherein a plasma formation area (6) is provided on the target (4), which plasma formation area (6) is not covered by the masking (5). The invention further relates to a target (4), an arrangement of the apparatus, a method, as well as a hollow article (1).