Mass Flow Controller Base Layout for Interchangeable Flow Components
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Solution Overview
Problem
Existing mass flow controllers (MFCs) face challenges in achieving accurate measurements, lower equipment costs, greater speed, and space-saving layouts due to the need for customized mounting bases and varied operating characteristics in semiconductor fabrication.
Innovation Solution
The development of a monolithic base with interchangeable flow components allows for the creation of mass flow controllers with different operating characteristics, enabling a common base to be used with various components, reducing customization and space requirements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If customized mounting bases are used for each mass flow controller configuration, then different operating characteristics can be achieved, but device complexity and manufacturing costs increase
Solution Approach 1:
The patent implements a universal monolithic mounting base design that can accommodate multiple different flow components (laminar flow restrictors, control valves, on/off valves, pressure transducers, temperature sensors) through standardized mounting regions. This single base design replaces the need for multiple customized bases, achieving different operating characteristics through component selection rather than base customization, thereby reducing device complexity and manufacturing costs.
2Adaptability or versatility
If customized mounting bases are used for each mass flow controller configuration, then different operating characteristics can be achieved, but manufacturing costs and production time increase
Solution Approach 1:
The monolithic mounting base is designed as a single standardized component that serves multiple configurations through standardized mounting regions. This universality allows mass production of a single base design rather than multiple customized bases, significantly reducing manufacturing costs while maintaining the ability to achieve different operating characteristics through interchangeable flow components.
Solution Approach 2:
The mounting base is designed with distinct standardized mounting regions that can independently accommodate different flow components. This segmentation allows flexible configuration assembly where components can be selectively mounted in different regions to achieve desired operating characteristics without requiring custom bases for each configuration.
3Ease of operation
If traditional MFC designs are used, then flow control functionality is achieved, but space requirements increase
Solution Approach 1:
The patent integrates multiple flow control components (laminar flow restrictors, control valves, on/off valves, pressure transducers, temperature sensors) onto a single monolithic mounting base. This consolidation merges what would traditionally be separate components requiring separate mounting spaces into one compact integrated unit, significantly reducing the overall device footprint while maintaining complete flow control functionality.
Data Source
AI summary
A gas flow control system for delivering a plurality of gas flows. The gas flow control system has a gas flow path extending from a gas inlet to first and second gas outlets. First and second flow restrictors are operably coupled to the gas flow path. First and second valves are operably coupled to the gas flow path such that when both first and second valves are in a fully open state, flows of gas from the first and second gas outlets are split according to the impedances of the first and second flow restrictors.