Mass Flow Controller Mode Switching to Extend Piezo Actuator Life
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Solution Overview
Problem
The lifespan of mass flow controllers used in semiconductor manufacturing processes is shortened due to the continuous application of voltage to maintain a zero gas flow rate when handling solid precursors with low vapor pressure.
Innovation Solution
A flow-rate controller is designed to switch between a control mode for regulating a predetermined flow rate and a full open mode without applying voltage, minimizing wear on the piezo actuator by closing valves when not in use.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the flow-rate controller continuously regulates flow rate through regulator operation, then flow rate control precision is improved, but the lifespan of the flow-rate controller is shortened
Solution Approach 1:
The system periodically switches between control mode (regulator operation) and full open mode (regulator closed), rather than continuously operating the regulator. This periodic switching reduces cumulative wear on the piezo actuator while maintaining flow rate control precision when needed during actual processing operations.
Solution Approach 2:
The harmful continuous voltage application to the piezo actuator is extracted and removed by implementing full open mode, where the regulator is completely closed and no voltage is applied. This separates the control function from continuous actuator operation, preserving the actuator's lifespan.
2Duration of action of stationary object
If the regulator is set to full open state, then the lifespan of the piezo actuator is extended, but flow rate regulation capability is reduced
Solution Approach 1:
The system dynamically switches between two operational states (control mode and full open mode) based on processing requirements. This dynamic adaptability allows the flow-rate controller to maintain regulation capability when needed while preserving actuator lifespan during periods where full flow is sufficient.
Solution Approach 2:
The flow-rate controller is designed to universally handle both precise flow regulation (control mode) and full flow delivery (full open mode) through a single system. This multi-functionality allows the regulator to adapt its operation mode based on the specific processing requirements, maintaining both control precision and actuator longevity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration extends the lifespan of the mass flow controller by reducing the voltage load on the piezo actuator, thereby enhancing the durability and reliability of the controller.
Implementation Method 1
the lifespan of the flow-rate controller is shortened due to the continuous application of voltage to maintain a zero gas flow rate
Data Source
AI summary
There is provided a technique that includes a flow-rate controller including a regulator configured to be capable of regulating a flow rate of a gas; and a controller configured to be capable of switching between a first mode of the flow-rate controller in which the flow rate of the gas is regulated to a predetermined flow rate through operation of the regulator, and a second mode of the flow-rate controller in which the regulator is set to be in a full open state.