Mass Flow Controller Valve With Diaphragm-Sealed Push Rod
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Solution Overview
Problem
Existing gas mass flow controllers have complex structures with high manufacturing costs and high failure rates due to the use of spring pieces for valve operation, which are prone to fatigue and failure.
Innovation Solution
A gas flow regulating device with a push rod and elastic diaphragm, driven by a piezoelectric assembly, simplifies the structure and reduces the number of parts in contact with gas, replacing the spring pieces with an elastic diaphragm to enhance reliability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If spring pieces are used to achieve contact seal or separation between valve core and valve port, then the valve can be operated, but the spring pieces are prone to fatigue and failure due to frequent compression and deformation
Solution Approach 1:
The patent removes the spring pieces from the valve structure entirely and replaces them with a push rod component that is elastically connected through an elastic diaphragm. This extraction of the problematic spring pieces eliminates the source of fatigue and failure while maintaining the necessary elastic functionality through the diaphragm.
Solution Approach 2:
The patent replaces the mechanical spring piece system with an elastic diaphragm-based system. The elastic diaphragm provides the necessary elastic connection between the push rod and the valve core, substituting the failed mechanical spring mechanism with a more reliable elastic membrane structure that does not suffer from the same fatigue issues.
2Manufacturing precision
If complex valve core and valve port structures are used to achieve precise flow control, then flow regulation accuracy is improved, but manufacturing difficulty and cost increase significantly
Solution Approach 1:
The patent divides the valve system into distinct functional components: a simplified valve port component, a separate push rod component with elastic diaphragm, and a driving assembly. This segmentation allows each component to be manufactured independently with simpler requirements, reducing overall manufacturing difficulty while maintaining precise flow control through the coordinated operation of the segmented parts.
Solution Approach 2:
The patent employs an elastic diaphragm as a flexible thin film element to replace complex rigid mechanical structures. The elastic diaphragm provides the necessary sealing and actuation functions through its flexibility, eliminating the need for complex machined surfaces and tight tolerances that would increase manufacturing difficulty and cost.
3Reliability
If multiple parts are used in contact with gas to achieve sealing and flow control, then sealing performance is improved, but the number of parts requiring special material and surface treatment increases
Solution Approach 1:
The patent merges multiple gas-contact functions into fewer components. The elastic diaphragm simultaneously provides sealing, actuation, and structural support functions that previously required multiple separate parts. The push rod component integrates the sealing surface and actuation mechanism, reducing the total number of gas-contact parts while maintaining reliable sealing performance.
Solution Approach 2:
The elastic diaphragm serves multiple functions: it acts as a sealing element, a structural support, and an actuation mechanism. This multi-functionality reduces the number of specialized parts needed in the gas path, simplifying the overall device structure while maintaining comprehensive sealing and control capabilities.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces manufacturing costs, minimizes part failure, and improves the reliability of the device by using an elastic diaphragm to seal and regulate gas flow, while maintaining precise control over gas flow.
Implementation Method 1
a piezoelectric material is provided in the closed space; and elongation of the piezoelectric material is adjustable by adjusting a voltage applied to the piezoelectric material
Implementation Method 2
a compression spring set between the fixing piece and the push rod
Implementation Method 3
the push rod is elastically connected with the push rod component through an elastic diaphragm
Data Source
AI summary
The present disclosure provides a gas flow regulating device and a mass flow controller. The gas flow regulating device includes: a valve port component, in which a first inlet channel is provided; a push rod component, in which a first through hole is provided, a push rod being provided in the first through hole, a first end surface of the push rod facing a gas outlet end of the first inlet channel, and the push rod being elastically connected with the push rod component through an elastic diaphragm; and a driving assembly configured to drive the push rod to move along a direction of approaching or leaving the first inlet channel to cause the first end surface of the push rod to be in contact with and seal or separate from the gas outlet end of the first inlet channel. In the gas flow regulating device, the structure can be simplified, the number of parts in contact with gas can be reduced, and the fault caused by the failure of a spring piece can be avoided.