Mass Flow Controller Parameter Initialization for Faster Adjustment
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Solution Overview
Problem
Conventional mass flow controller adjustments are time-consuming and costly, requiring numerous procedures and fluid consumption, especially for Multi-Gas-Multi-Range (MGMR) and Pressure Insensitive (PI) functions, and can result in individual differences and faults due to incorrect part combinations or faulty components.
Innovation Solution
A method that determines initial parameter values for mass flow controllers based on accumulated data from past adjustments, using a server to store and extract common control condition data, reducing the number of adjustment procedures and minimizing personnel and fluid costs by starting adjustments from refined initial values.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional individual adjustment methods are used for mass flow controllers, then each controller can be adjusted to meet specifications, but the adjustment process becomes extremely time-consuming and costly, especially for MGMR and PI functions
Solution Approach 1:
The patent applies preliminary action by pre-adjusting mass flow controllers during the manufacturing process and storing the adjusted parameter values in a database. When a controller requires adjustment later, the pre-stored parameter values are retrieved and applied, eliminating the need for time-consuming individual adjustment procedures while maintaining manufacturing precision.
Solution Approach 2:
The patent uses copying by creating a database of parameter values from previously adjusted mass flow controllers. These stored parameter sets are then copied and applied to new or re-adjusted controllers, replacing the traditional method of individual adjustment and significantly reducing the time required while preserving adjustment accuracy.
2Manufacturing precision
If conventional adjustment procedures are followed, then controllers can be adjusted to specifications, but numerous procedures and fluid consumption are required, increasing costs
Solution Approach 1:
By pre-adjusting controllers during manufacturing and storing the parameter values, the system eliminates the need for repeated fluid-based adjustment procedures. The pre-stored parameters allow direct configuration without consuming additional test fluids, thereby reducing fluid loss while maintaining control accuracy.
Solution Approach 2:
The copying of stored parameter values from the database allows controllers to be configured without repeating the physical adjustment process that consumes fluid. This digital replication approach maintains control accuracy while eliminating the need for additional fluid consumption associated with conventional adjustment procedures.
3Stability of the object's composition
If regulators are installed upstream to absorb pressure changes, then gas supply inlet pressure stability is improved, but the gas piping system becomes more complex and costly
Solution Approach 1:
The patent extracts and removes the regulator component from the gas piping system by implementing pressure compensation through software algorithms in the mass flow controller itself. This digital pressure compensation replaces the physical regulator, maintaining pressure stability while eliminating the need for additional hardware and reducing system complexity.
Solution Approach 2:
The patent applies mechanics substitution by replacing the mechanical regulator with an electronic/software-based pressure compensation mechanism. The mass flow controller uses its sensors and control algorithms to compensate for pressure variations, substituting the mechanical pressure-regulating device and thereby reducing system complexity while maintaining pressure stability.
4Manufacturing precision
If mass flow controllers are adjusted individually for each gas kind and bin size, then specific control requirements are met, but stock for various backups is needed
Solution Approach 1:
The patent implements universality by creating a database that stores parameter values for multiple gas kinds and bin sizes. A single mass flow controller can retrieve and apply the appropriate parameter set from this database based on the specific gas and bin size requirements, enabling one controller to serve multiple functions and eliminating the need for separate backup controllers for different gas types.
Solution Approach 2:
By pre-adjusting controllers for various gas kinds and bin sizes during manufacturing and storing these parameter sets in a database, the system prepares multiple configuration profiles in advance. This allows a single controller to be quickly reconfigured for different gases and bin sizes without requiring individual physical adjustment, thereby achieving multi-gas applicability while maintaining gas-specific control accuracy.
Data Source
AI summary
As for a plurality of mass flow controllers, a parameter of a certain mass flow controller is adjusted under a certain control condition, and the adjusted parameter is related with the control condition and is stored in a server. Next, the data having the control condition common with each other is extracted from the data stored in the server, an initial value of the parameter is determined based on the extracted data, and the initial value of the parameter, which is thus determined, is related with the common control condition and is stored in the server. The mass flow controller is adjusted by using the initial value of the parameter determined in this way. Thereby, an adjustment of the mass flow controller can be completed in fewer procedures, and occurrence of fault in the adjustment of the mass flow controller can be prevented.