Mass Flow Meter Pressure Equalization for Sensor Protection

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Solution Overview

Problem

The sensor in mass flow meters is often damaged by high-pressure fluid due to differences in material composition between the pipeline and sensor, leading to inaccurate flow rate detection.

Innovation Solution

A mass flow meter and controller design that includes a main member with a pressure chamber and air channel to equalize internal and external pressures, using a chamber and air channel to balance fluid flow through the sensor, reducing the likelihood of damage from high-pressure fluid.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If the sensor is made of plastic and the pipeline is made of metal, then the sensor can be manufactured with ease, but the sensor is damaged by high-pressure fluid

Engineering Contradiction:
Improvesensor manufacturingVSAvoidsensor durability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent introduces a pressure equalization chamber as an intermediary component between the high-pressure pipeline and the plastic sensor. This chamber equalizes the pressure on both sides of the sensor, allowing the sensor to be made of plastic (easy to manufacture) while protecting it from high-pressure damage (improved reliability). The pressure equalization chamber acts as a mediator that decouples the high-pressure environment from the sensor.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Device complexity

If the sensor is exposed to high-pressure fluid directly, then the flow rate detection is simplified, but the sensor develops leaks and becomes damaged

Engineering Contradiction:
Improvedetection system simplicityVSAvoidsensor integrity
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent segments the flow path into distinct zones: a high-pressure main channel and a low-pressure sensor channel. The sensor is placed in the low-pressure zone where it can safely detect flow rate without being exposed to high-pressure fluid. This segmentation allows the detection function to be separated from the high-pressure transport function, maintaining both simplicity and reliability.

Inventive Principle:
Principle #1Segmentation

3Adaptability or versatility

If the sensor material differs from the pipeline material, then manufacturing flexibility is improved, but material incompatibility causes sensor damage

Engineering Contradiction:
Improvematerial selection flexibilityVSAvoidpressure-induced damage
Core Design Contradiction:
Adaptability or versatilityVSObject-affected harmful factors

Solution Approach 1:

The pressure equalization chamber serves as a protective intermediary that allows different materials (metal pipeline and plastic sensor) to coexist without direct high-pressure interaction. This mediator enables material selection flexibility while preventing pressure-induced damage that would otherwise result from material incompatibility.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design maintains pressure equilibrium within the sensor, minimizing damage and ensuring accurate flow rate detection by equalizing internal and external pressures.

Implementation Method 1

allowing a portion of the fluid in the main channel flows into the pressure chamber via the air channel to keep a pressure in the sensor identical to an outside pressure

Methodology Applied
Scientific EffectPressure equalization: Pascal's Law

Data Source

PatentUS20250334434A1Mass Flow Meter And Mass Flow Controller Having The Same
Publication Date: 2025.10.30 MICROPROGRAM INFORMATION CO LTD
  • US20250334434A1 patent drawing
  • US20250334434A1 patent drawing
  • US20250334434A1 patent drawing

AI summary

A mass flow meter includes a main member and a sensor. The main member has a main channel, a first sensor channel, a second sensor channel, and a chamber. The first and second sensor channels are connected to the main channel and the chamber respectively. The sensor is mounted within the chamber and connected to the first and the second sensor channels, so that the sensor may receive a fluid in the main channel to sense a flow rate of the fluid. The main member further has a pressure chamber, which is communicated with the main channel and the chamber, allowing a portion of the fluid flows into the pressure chamber to maintain internal and external pressure of the sensor at approximately the same level. On the other hand, a mass flow controller having the mass flow meter is also provided.